JPS58193631U - semiconductor manufacturing equipment - Google Patents

semiconductor manufacturing equipment

Info

Publication number
JPS58193631U
JPS58193631U JP9034282U JP9034282U JPS58193631U JP S58193631 U JPS58193631 U JP S58193631U JP 9034282 U JP9034282 U JP 9034282U JP 9034282 U JP9034282 U JP 9034282U JP S58193631 U JPS58193631 U JP S58193631U
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
manufacturing equipment
susceptor
gas supply
supply head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9034282U
Other languages
Japanese (ja)
Inventor
小林　新司
Original Assignee
日本電気ホームエレクトロニクス株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本電気ホームエレクトロニクス株式会社 filed Critical 日本電気ホームエレクトロニクス株式会社
Priority to JP9034282U priority Critical patent/JPS58193631U/en
Publication of JPS58193631U publication Critical patent/JPS58193631U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図および第２図は従来のＣＶＤ装置の一例を示す要
部概略正面図および左側面図、第３図は従来装置に用い
られているサセプタの斜視図、第　　　４図はこの考案
の装置に用いられるサセプタの実施例の斜視図である。 １・・・ガス供給ヘッド、４・・・半導体ウェーハ、５
・・・ヒータブロック、１２・・・サセプタ。 第２図 第３図1 and 2 are schematic front and left side views of main parts showing an example of a conventional CVD device, FIG. 3 is a perspective view of a susceptor used in the conventional device, and FIG. 4 is a device of this invention. 1 is a perspective view of an embodiment of a susceptor used in FIG. 1... Gas supply head, 4... Semiconductor wafer, 5
...Heater block, 12...Susceptor. Figure 2 Figure 3

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 成長用ガスを吹き出すガス供給ヘッドと、このガス供給
ヘッドの下方を半導体ウェーハを載置して移動するサセ
プタと、サセプタ上の半導体ウェーハを加熱するヒータ
とを備える半導体製造装置において、前記サセプタをセ
ラミックで構成したことを特徴とする半導体製造装置。A semiconductor manufacturing apparatus comprising a gas supply head that blows out a growth gas, a susceptor that places a semiconductor wafer and moves below the gas supply head, and a heater that heats the semiconductor wafer on the susceptor. A semiconductor manufacturing device characterized by comprising:
JP9034282U 1982-06-17 1982-06-17 semiconductor manufacturing equipment Pending JPS58193631U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9034282U JPS58193631U (en) 1982-06-17 1982-06-17 semiconductor manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9034282U JPS58193631U (en) 1982-06-17 1982-06-17 semiconductor manufacturing equipment

Publications (1)

Publication Number Publication Date
JPS58193631U true JPS58193631U (en) 1983-12-23

Family

ID=30098862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9034282U Pending JPS58193631U (en) 1982-06-17 1982-06-17 semiconductor manufacturing equipment

Country Status (1)

Country Link
JP (1) JPS58193631U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121650A (en) * 1979-03-14 1980-09-18 Pioneer Electronic Corp Cvd device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55121650A (en) * 1979-03-14 1980-09-18 Pioneer Electronic Corp Cvd device

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