JPS5939937U - Semiconductor wafer support stand - Google Patents

Semiconductor wafer support stand

Info

Publication number
JPS5939937U
JPS5939937U JP13487682U JP13487682U JPS5939937U JP S5939937 U JPS5939937 U JP S5939937U JP 13487682 U JP13487682 U JP 13487682U JP 13487682 U JP13487682 U JP 13487682U JP S5939937 U JPS5939937 U JP S5939937U
Authority
JP
Japan
Prior art keywords
wafer support
semiconductor wafer
support stand
boat
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13487682U
Other languages
Japanese (ja)
Inventor
古屋　明雪
Original Assignee
株式会社東芝
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東芝 filed Critical 株式会社東芝
Priority to JP13487682U priority Critical patent/JPS5939937U/en
Publication of JPS5939937U publication Critical patent/JPS5939937U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の半導体ウェハ支持台の斜視図、第２図は
１実施例の半導体ウェハ支持台の斜視図である。 １１・・・ウェハ支持ボート、１２．１２・・・ウェハ
支持ボートの溝、１３・・・ボート支持台。FIG. 1 is a perspective view of a conventional semiconductor wafer support, and FIG. 2 is a perspective view of a semiconductor wafer support of one embodiment. 11... Wafer support boat, 12.12... Groove of wafer support boat, 13... Boat support stand.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 軸と垂直にウェハをその周縁を装入させて支持する溝が
設けられた炭化けい素で作られたウェハ支持ボートと、
石英の棒で枠状に結合され上面に前記ウェハ支持ボート
を保持するボート保持台とからなる半導体ウェハ支持台
。a wafer support boat made of silicon carbide and provided with a groove for inserting and supporting a wafer by its periphery perpendicular to the axis;
A semiconductor wafer support stand comprising a boat holding stand connected in a frame shape with a quartz rod and holding the wafer support boat on its upper surface.
JP13487682U 1982-09-07 1982-09-07 Semiconductor wafer support stand Pending JPS5939937U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13487682U JPS5939937U (en) 1982-09-07 1982-09-07 Semiconductor wafer support stand

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13487682U JPS5939937U (en) 1982-09-07 1982-09-07 Semiconductor wafer support stand

Publications (1)

Publication Number Publication Date
JPS5939937U true JPS5939937U (en) 1984-03-14

Family

ID=30303779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13487682U Pending JPS5939937U (en) 1982-09-07 1982-09-07 Semiconductor wafer support stand

Country Status (1)

Country Link
JP (1) JPS5939937U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143511U (en) * 1984-03-05 1985-09-24 釜屋化学工業株式会社 Coating liquid storage container

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143511U (en) * 1984-03-05 1985-09-24 釜屋化学工業株式会社 Coating liquid storage container
JPS6327608Y2 (en) * 1984-03-05 1988-07-26

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