JPS6016542U - Boat for semiconductor wafers - Google Patents
Boat for semiconductor wafersInfo
- Publication number
- JPS6016542U JPS6016542U JP10650983U JP10650983U JPS6016542U JP S6016542 U JPS6016542 U JP S6016542U JP 10650983 U JP10650983 U JP 10650983U JP 10650983 U JP10650983 U JP 10650983U JP S6016542 U JPS6016542 U JP S6016542U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- semiconductor wafers
- grooves
- wafers
- distance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図はウェーハを載置したボートの斜視図、第２図は
小さい幅の溝が設けられたボートにおける石英ロッドの
一部を示す断面図、第３図は大なる幅の溝が設けられた
ボートにおける石英ロンドの一部を示す断面図、第４図
はこの考案の１実施例のボートにおける石英ロンドの一
部を示す断面図である。 。
１ａ、 １ｂ・・・・・・石英ロッド、２ａ、 ２ｂ
・・・・・・（石英ロッドの）ＬＩＯ・・・・・・ウェ
ーハ、１２ａ。
１２ｂ・・・・・・小なる幅の溝、２２ａ、２２ｂ・・
・・・・大なる幅の溝。Figure 1 is a perspective view of a boat with wafers placed on it, Figure 2 is a cross-sectional view of a part of the quartz rod in the boat with a groove of a small width, and Figure 3 is a view of a boat with a groove of a large width. FIG. 4 is a sectional view showing a part of the quartz iron in a boat according to an embodiment of the present invention. . 1a, 1b...Quartz rod, 2a, 2b
......(quartz rod) LIO...wafer, 12a. 12b...Small width groove, 22a, 22b...
...A huge groove.
Claims (1)
れた一対の棒状耐熱部材に、これらの部材が占める平面
の一方の側で各々に各軸と直角に細い溝を刻設し、これ
らの溝に半導体ウェハの周縁部の一部を挿通させて垂直
またはほぼ垂直に整列させて支持する半導体ウェーハ用
ボートにおいて、溝の幅を周期的に変化させて設け、同
じ幅の溝間の距離が前後の工程にて用いられるウェーハ
支持治具におけるウェーハ間の距離に等しくなるように
形成されていることを特徴とする半導体ウェーハ用ボー
ト。A pair of rod-shaped heat-resistant members are arranged in parallel at an interval smaller than the diameter of the semiconductor wafer, and on one side of the plane occupied by these members, thin grooves are carved perpendicular to each axis, and these grooves are In a boat for semiconductor wafers, in which a part of the peripheral edge of semiconductor wafers is inserted and supported in vertical or nearly vertical alignment, the width of the grooves is periodically changed, and the distance between the grooves of the same width is set in the front and back. A boat for semiconductor wafers, characterized in that the boat is formed to be equal to the distance between wafers in a wafer support jig used in a process.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10650983U JPS6016542U (en) | 1983-07-11 | 1983-07-11 | Boat for semiconductor wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10650983U JPS6016542U (en) | 1983-07-11 | 1983-07-11 | Boat for semiconductor wafers |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6016542U true JPS6016542U (en) | 1985-02-04 |
Family
ID=30249221
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10650983U Pending JPS6016542U (en) | 1983-07-11 | 1983-07-11 | Boat for semiconductor wafers |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6016542U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100304258B1 (en) * | 1999-09-01 | 2001-11-01 | 윤종용 | Wafer boat |
-
1983
- 1983-07-11 JP JP10650983U patent/JPS6016542U/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100304258B1 (en) * | 1999-09-01 | 2001-11-01 | 윤종용 | Wafer boat |
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