JPS6426843U

JPS6426843U -

Info

Publication number: JPS6426843U
Application number: JP12212387U
Authority: JP
Priority date: 1987-08-11
Filing date: 1987-08-11
Publication date: 1989-02-15

Description

[Brief explanation of the drawing]

第１図は本考案実施例の図で、そのａは斜視図
、ｂはウエハ保持状態を示す図、ｃは平面図、第
２図ａとｂは従来例斜視図、第３図は従来例の問
題点を示す図である。第１図において、１１はウエハキヤリア、１２
は押え板、１３ａは上部支持棒、１３ｂは下部支
持棒、１４は樹脂材部、１５は芯棒、１６ａと１
６ｂはウエハ保持溝、３０はウエハ、を示す。 Fig. 1 is a diagram of an embodiment of the present invention, in which a is a perspective view, b is a view showing a wafer holding state, c is a plan view, Fig. 2 a and b are perspective views of a conventional example, and Fig. 3 is a conventional example. FIG. In FIG. 1, 11 is a wafer carrier; 12 is a wafer carrier;
1 is a presser plate, 13a is an upper support rod, 13b is a lower support rod, 14 is a resin material part, 15 is a core rod, 16a and 1
6b indicates a wafer holding groove, and 30 indicates a wafer.

Claims

[Claims for Utility Model Registration] A wafer carrier 11 consisting of a pair of opposing presser plates 12 and three support rods 13a and 13b, two of which are disposed on the upper side and one on the lower side between the presser plates 12.
In this, the support rods 13a, 13b made of a resin material have tapered teardrop-shaped cross sections, and a heat-resistant core rod 15 is enclosed inside the resin material part 14, and the support rods 13a, 13b and the support rods 13b formed therein are The wafer holding grooves 16a and 16b are not provided with horizontal parts, and the wafer 30 and the support rods 13a and 13b are
A wafer carrier characterized by a structure that makes almost point contact with the wafer carrier.