JPS59112943U - Semiconductor heat treatment jig - Google Patents

Semiconductor heat treatment jig

Info

Publication number
JPS59112943U
JPS59112943U JP720283U JP720283U JPS59112943U JP S59112943 U JPS59112943 U JP S59112943U JP 720283 U JP720283 U JP 720283U JP 720283 U JP720283 U JP 720283U JP S59112943 U JPS59112943 U JP S59112943U
Authority
JP
Japan
Prior art keywords
heat treatment
treatment jig
semiconductor heat
semiconductor substrate
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP720283U
Other languages
Japanese (ja)
Inventor
充 嶋津
武部 敏彦
Original Assignee
住友電気工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 住友電気工業株式会社 filed Critical 住友電気工業株式会社
Priority to JP720283U priority Critical patent/JPS59112943U/en
Publication of JPS59112943U publication Critical patent/JPS59112943U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図イ1口は従来の熱処理治具の例を示す斜−親図で
、イ図は半導体基板が小口径の場合、0図は同じく大口
径の場合を示す。第2図イ1ロ、ハは本考案治具の実施
例を示す図で、イ図は並べた状態を示す斜視図、0図は
横断面図、へ図は1個を示す斜視図である。第3図、第
4図は従来および本考案治具により熱処理されたGaA
s半導体基板の基板面内の活性層の深さ分布を示す図で
、第3図は従来例、第4図は本考案によるものを示す。 1.11・・・熱処理治具、2・・・半導体基板、3・
・・半導体基板をのせる台、4.14・・・支持枠、5
゜15・・・支柱、6・・・石英管、13・・・網目。
Figure 1A1 is a diagonal diagram showing an example of a conventional heat treatment jig, where Figure A shows the case where the semiconductor substrate has a small diameter, and Figure 0 shows the case where the semiconductor substrate has a large diameter. Figures 2A, 2B, and 2C are diagrams showing an embodiment of the jig of the present invention; Figure A is a perspective view showing the jig arranged side by side, Figure 0 is a cross-sectional view, and Figure 2 is a perspective view showing one jig. . Figures 3 and 4 show GaA heat-treated using conventional and inventive jigs.
FIG. 3 is a diagram showing the depth distribution of the active layer in the plane of the semiconductor substrate, FIG. 3 shows the conventional example, and FIG. 4 shows the one according to the present invention. 1.11...Heat treatment jig, 2...Semiconductor substrate, 3.
...Semiconductor substrate mounting stand, 4.14...Support frame, 5
゜15... Strut, 6... Quartz tube, 13... Mesh.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] (1)半導体基板をのせる台を支持する複数本の支柱を
前記基板の周辺より内側の直下に配置したことを特徴と
する半導体熱処理治具。
(1) A semiconductor heat treatment jig characterized in that a plurality of pillars supporting a table on which a semiconductor substrate is placed are arranged directly below the periphery of the substrate.
(2)半導体基板をのせる台が網目又は平板である実用
新案登録請求の範囲第1項記載の半導体熱処理治具。
(2) The semiconductor heat treatment jig according to claim 1, wherein the table on which the semiconductor substrate is placed is a mesh or a flat plate.
JP720283U 1983-01-20 1983-01-20 Semiconductor heat treatment jig Pending JPS59112943U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP720283U JPS59112943U (en) 1983-01-20 1983-01-20 Semiconductor heat treatment jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP720283U JPS59112943U (en) 1983-01-20 1983-01-20 Semiconductor heat treatment jig

Publications (1)

Publication Number Publication Date
JPS59112943U true JPS59112943U (en) 1984-07-30

Family

ID=30138733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP720283U Pending JPS59112943U (en) 1983-01-20 1983-01-20 Semiconductor heat treatment jig

Country Status (1)

Country Link
JP (1) JPS59112943U (en)

Similar Documents

Publication Publication Date Title
JPS59112943U (en) Semiconductor heat treatment jig
JPS59117138U (en) semiconductor manufacturing equipment
JPS6016542U (en) Boat for semiconductor wafers
JPS5881946U (en) Semiconductor wafer loading jig
JPS58195698U (en) Holding device for reticulated contact base material for wastewater treatment
JPS59131740U (en) overhead projector
JPS6056461U (en) polishing jig
JPS59111040U (en) Jig for semiconductor manufacturing
JPS59146266U (en) trolley
JPS59106927U (en) Rebar assembly structure
JPS60172398U (en) Workpiece carrier for bonding
JPS60124031U (en) vertical furnace
JPS60151831U (en) panel support
JPS5978376U (en) Elevator hoisting device
JPS5844848U (en) Semiconductor wafer fixing jig
JPS5850728U (en) Support structure of tuning fork type vibrator
JPS60150986U (en) panel support
JPS60194554U (en) printer device
JPS59193082U (en) Placement stand for speakers, etc.
JPS5916140U (en) Carrier for semiconductor wafers
JPS58187591U (en) heat jealousy
JPS59118972U (en) Mounting frame for heat collector
JPS60119745U (en) Semiconductor substrate holding jig
JPS5895449U (en) Long metal building component holding device
JPS59167840U (en) Matsutto basic structure