JPS5881946U - Semiconductor wafer loading jig - Google Patents
Semiconductor wafer loading jigInfo
- Publication number
- JPS5881946U JPS5881946U JP9425481U JP9425481U JPS5881946U JP S5881946 U JPS5881946 U JP S5881946U JP 9425481 U JP9425481 U JP 9425481U JP 9425481 U JP9425481 U JP 9425481U JP S5881946 U JPS5881946 U JP S5881946U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- wafer loading
- loading jig
- supports
- abstract
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図Ａは従来の半導体ウェハー装填治具の斜視図、第
１図Ｂは第１図Ａの１部の拡大図、第２図は本考案にお
ける支持体の斜視図、第３図Ａは本考案の半導体ウェハ
ー装填治具の斜視図、第３図Ｂは第３図Ａの■部の拡大
図、第４図はリンク機構の拡大図、第５図は本考案の使
用状況を示す説明図である。
５・・・支持体、６・・・半導体ウェハー、７・・・リ
ンク機構。FIG. 1A is a perspective view of a conventional semiconductor wafer loading jig, FIG. 1B is an enlarged view of a part of FIG. 1A, FIG. 2 is a perspective view of the support according to the present invention, and FIG. A perspective view of the semiconductor wafer loading jig of the present invention, FIG. 3B is an enlarged view of the section ■ in FIG. 3A, FIG. 4 is an enlarged view of the link mechanism, and FIG. 5 is an explanation showing how the present invention is used. It is a diagram. 5... Support body, 6... Semiconductor wafer, 7... Link mechanism.
Claims (1)
に配列し、各支持体間をリンク機構により拡縮可能に連
結したことを特徴とする半導体ウェハー装填治具。1. A semiconductor wafer loading jig, characterized in that a plurality of supports each supporting a semiconductor wafer are arranged in parallel, and each of the supports is expandably and contractably connected by a link mechanism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9425481U JPS5881946U (en) | 1981-06-25 | 1981-06-25 | Semiconductor wafer loading jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9425481U JPS5881946U (en) | 1981-06-25 | 1981-06-25 | Semiconductor wafer loading jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5881946U true JPS5881946U (en) | 1983-06-03 |
Family
ID=29889188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9425481U Pending JPS5881946U (en) | 1981-06-25 | 1981-06-25 | Semiconductor wafer loading jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5881946U (en) |
-
1981
- 1981-06-25 JP JP9425481U patent/JPS5881946U/en active Pending
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