JPS60124031U - vertical furnace - Google Patents

vertical furnace

Info

Publication number
JPS60124031U
JPS60124031U JP1084084U JP1084084U JPS60124031U JP S60124031 U JPS60124031 U JP S60124031U JP 1084084 U JP1084084 U JP 1084084U JP 1084084 U JP1084084 U JP 1084084U JP S60124031 U JPS60124031 U JP S60124031U
Authority
JP
Japan
Prior art keywords
vertical furnace
wafer carrier
view
ring
stacked
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1084084U
Other languages
Japanese (ja)
Inventor
魚落　泰雄
下田　春夫
喜美 塩谷
守 前田
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP1084084U priority Critical patent/JPS60124031U/en
Publication of JPS60124031U publication Critical patent/JPS60124031U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の横型炉用ウェハキャリア例を示す斜視図
、第２図は本考案の縦型炉用ウェハキャリアの斜視図と
ウェハ装着の石英リング断面図、及び第３図は前第２図
とは異なる他実施例としてのウェハキャリアの斜視図と
石英リングの断面図である。 図中、１は支持棒、２は半円形の支持体、３は加工対象
のウェハ、６は支柱、５は石英リング、７は５の内側面
に設ける段差（溝）及び８は突起である。FIG. 1 is a perspective view showing an example of a conventional wafer carrier for a horizontal furnace, FIG. 2 is a perspective view of the wafer carrier for a vertical furnace of the present invention and a sectional view of a quartz ring with a wafer attached, and FIG. FIG. 2 is a perspective view of a wafer carrier and a cross-sectional view of a quartz ring as another embodiment different from those shown in the figure. In the figure, 1 is a support rod, 2 is a semicircular support, 3 is a wafer to be processed, 6 is a column, 5 is a quartz ring, 7 is a step (groove) provided on the inner surface of 5, and 8 is a protrusion. .

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] リング内側面に段差が形成され、該段差にウェハを収納
する石英リングを多段に積み重ねたウェハキャリアを具
備することを特徴とする縦型炉。A vertical furnace comprising a wafer carrier in which a step is formed on the inner surface of the ring, and quartz rings are stacked in multiple stages to store wafers in the step.
JP1084084U 1984-01-27 1984-01-27 vertical furnace Pending JPS60124031U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1084084U JPS60124031U (en) 1984-01-27 1984-01-27 vertical furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1084084U JPS60124031U (en) 1984-01-27 1984-01-27 vertical furnace

Publications (1)

Publication Number Publication Date
JPS60124031U true JPS60124031U (en) 1985-08-21

Family

ID=30492391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1084084U Pending JPS60124031U (en) 1984-01-27 1984-01-27 vertical furnace

Country Status (1)

Country Link
JP (1) JPS60124031U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62128633U (en) * 1986-02-07 1987-08-14
JPS62229932A (en) * 1986-03-31 1987-10-08 Shinetsu Sekiei Kk Vertical housing jig

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62128633U (en) * 1986-02-07 1987-08-14
JPS62229932A (en) * 1986-03-31 1987-10-08 Shinetsu Sekiei Kk Vertical housing jig

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