JPS62128633U - - Google Patents

Info

Publication number
JPS62128633U
JPS62128633U JP1569486U JP1569486U JPS62128633U JP S62128633 U JPS62128633 U JP S62128633U JP 1569486 U JP1569486 U JP 1569486U JP 1569486 U JP1569486 U JP 1569486U JP S62128633 U JPS62128633 U JP S62128633U
Authority
JP
Japan
Prior art keywords
stepped portion
storage jig
vertical storage
semiconductor wafer
approximately
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1569486U
Other languages
Japanese (ja)
Other versions
JPH0715138Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986015694U priority Critical patent/JPH0715138Y2/en
Publication of JPS62128633U publication Critical patent/JPS62128633U/ja
Application granted granted Critical
Publication of JPH0715138Y2 publication Critical patent/JPH0715138Y2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第２図及び第４図はいずれも本考案が適用され
る縦型収納治具の全体斜視図を示す。第１Ａ図乃
至第１Ｃ図は、第２図に示す縦型収納治具に本考
案を適用した実施例を示し、第１Ａ図は環状部材
部分を示す拡大縦断面図、第１Ｂ図は環状部材部
分を示す横断面図、第１Ｃ図及び第１Ｄ図はいず
れも第１Ａ図の変形例を示す拡大縦断面図を示す
。第３Ａ図乃至第３Ｂ図はいずれも、従来公知の
環状部材を示す拡大縦断面図である。 １：半導体ウエハー、２：環状部材（ウエハー
支持面）、６：段差部。 FIG. 2 and FIG. 4 both show an overall perspective view of a vertical storage jig to which the present invention is applied. 1A to 1C show an embodiment in which the present invention is applied to the vertical storage jig shown in FIG. 2, FIG. 1A is an enlarged vertical cross-sectional view showing the annular member portion, and FIG. Each of the transverse cross-sectional views, FIG. 1C and FIG. 1D showing a portion thereof, is an enlarged vertical cross-sectional view showing a modification of FIG. 1A. 3A and 3B are enlarged longitudinal sectional views showing a conventionally known annular member. 1: Semiconductor wafer, 2: Annular member (wafer support surface), 6: Step portion.

Claims (1)

【実用新案登録請求の範囲】 (1) 上下方向に並列して形成された複数のウエ
ハー支持面上に半導体ウエハーを載置させ、該ウ
エハーを積層支持する縦型収納治具において、前
記ウエハー支持面上の一側を略断面矩形状の段差
部となし、該段差部に半導体ウエハーを位置決め
支持可能に構成した事を特徴とする縦型収納治具
。 (2) 前記段差部深さが、半導体ウエハー板厚と
ほぼ同一である実用新案登録請求の範囲第１項記
載の縦型収納治具。 (3) 前記段差部を半導体ウエハー直径とほぼ同
一の周径を有する円弧状に形成した実用新案登録
請求の範囲第１項記載の縦型収納治具。[Claims for Utility Model Registration] (1) In a vertical storage jig that places semiconductor wafers on a plurality of wafer support surfaces formed in parallel in the vertical direction and supports the wafers in a stacked manner, the wafer support 1. A vertical storage jig, characterized in that one side of the surface has a stepped portion having a substantially rectangular cross section, and a semiconductor wafer can be positioned and supported on the stepped portion. (2) The vertical storage jig according to claim 1, wherein the depth of the stepped portion is approximately the same as the thickness of the semiconductor wafer. (3) The vertical storage jig according to claim 1, wherein the stepped portion is formed in an arc shape having a circumferential diameter that is approximately the same as the diameter of the semiconductor wafer.
JP1986015694U 1986-02-07 1986-02-07 Vertical storage jig Expired - Lifetime JPH0715138Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986015694U JPH0715138Y2 (en) 1986-02-07 1986-02-07 Vertical storage jig

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986015694U JPH0715138Y2 (en) 1986-02-07 1986-02-07 Vertical storage jig

Publications (2)

Publication Number Publication Date
JPS62128633U true JPS62128633U (en) 1987-08-14
JPH0715138Y2 JPH0715138Y2 (en) 1995-04-10

Family

ID=30806862

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986015694U Expired - Lifetime JPH0715138Y2 (en) 1986-02-07 1986-02-07 Vertical storage jig

Country Status (1)

Country Link
JP (1) JPH0715138Y2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01239853A (en) * 1988-03-18 1989-09-25 Tel Sagami Ltd Cage-shaped boat
JPH02114938U (en) * 1989-03-03 1990-09-14
JPH02122431U (en) * 1989-03-20 1990-10-08
DE4340288A1 (en) * 1992-11-27 1994-06-01 Toshiba Ceramics Co Vertical boat and method for its production
DE4340287A1 (en) * 1992-11-30 1994-06-09 Toshiba Ceramics Co Vertical boat
DE4342976A1 (en) * 1992-12-17 1994-06-23 Toshiba Ceramics Co Vertical device for heat treatment of semiconductors

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4812671U (en) * 1971-06-21 1973-02-12
JPS51879A (en) * 1974-06-21 1976-01-07 Hitachi Ltd Cvd sochi
JPS60124031U (en) * 1984-01-27 1985-08-21 富士通株式会社 vertical furnace

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4812671U (en) * 1971-06-21 1973-02-12
JPS51879A (en) * 1974-06-21 1976-01-07 Hitachi Ltd Cvd sochi
JPS60124031U (en) * 1984-01-27 1985-08-21 富士通株式会社 vertical furnace

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01239853A (en) * 1988-03-18 1989-09-25 Tel Sagami Ltd Cage-shaped boat
JPH02114938U (en) * 1989-03-03 1990-09-14
JPH02122431U (en) * 1989-03-20 1990-10-08
DE4340288A1 (en) * 1992-11-27 1994-06-01 Toshiba Ceramics Co Vertical boat and method for its production
DE4340287A1 (en) * 1992-11-30 1994-06-09 Toshiba Ceramics Co Vertical boat
DE4342976A1 (en) * 1992-12-17 1994-06-23 Toshiba Ceramics Co Vertical device for heat treatment of semiconductors

Also Published As

Publication number Publication date
JPH0715138Y2 (en) 1995-04-10

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