JPS5864127U - piezoelectric vibrator wafer - Google Patents
piezoelectric vibrator waferInfo
- Publication number
- JPS5864127U JPS5864127U JP15758981U JP15758981U JPS5864127U JP S5864127 U JPS5864127 U JP S5864127U JP 15758981 U JP15758981 U JP 15758981U JP 15758981 U JP15758981 U JP 15758981U JP S5864127 U JPS5864127 U JP S5864127U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- piezoelectric vibrator
- vibrator
- wafer according
- vibrator wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案圧電振動子ウェハを示す平面図、第２図
は、第１図のウェハ分割後の連チップ平面図、第３図は
、第２図の連チップにプラグリード端子を半田付した平
面図、第４図は、第３図のプラグ半田付後の単体振動子
ユニットに分割した平面図である。
１・・・・・・ウェハ分割溝、２・・・・・・チップ分
割溝、３・・・・・・チップ、４・・・・・・プラグリ
ード端子、５・・・・・・プ 。
ラグ本体、６・・・・・・振動子支持部、１０・・・・
・・ウエノ＼ ゛外周ワク、２０・・・・・・ウェハ内
部ワク。Fig. 1 is a plan view showing the piezoelectric vibrator wafer of the present invention, Fig. 2 is a plan view of the continuous chips after dividing the wafer shown in Fig. 1, and Fig. 3 is a plan view of the continuous chips shown in Fig. 2 by soldering plug lead terminals. The attached plan view, FIG. 4, is a plan view of FIG. 3 divided into single vibrator units after plug soldering. 1...Wafer dividing groove, 2...Chip dividing groove, 3...Chip, 4...Plug lead terminal, 5...Plug lead terminal. . Lug body, 6... vibrator support part, 10...
・・Ueno＼ ゛Outer circumferential work, 20...Wafer internal work.
Claims (1)
おいて、ウェハ内外部ワクに分割溝を設けたことを特徴
とする圧電振動子ウェハ。 −（２）ウェハ外周部
ワクにウェハ分割溝を設けたことを特徴とする実用新案
登録請求の範囲第１項記載の圧電振動子ウェハ。 （３） ウェハ内部ワクにチップ分割溝を設けたこと
を特徴とする実用新案登録請求の一間第１項記載の圧電
振動子ウェハ。 − （４）隣接チップ支え方向が１８０°逆方向とした構゛
成よりなることを特徴とする実用新案登録請求の
範囲第１項記載の圧電振動子ウェハ。 （５）内部ワク上に振動子支持部を設けたことを特徴と
する実用新案登録請求の範囲第１項記載の圧電振動子ウ
ェハ。[Claims for Utility Model Registration] (1) A piezoelectric vibrator wafer having a plurality of vibrator chips, characterized in that dividing grooves are provided in the inner and outer parts of the wafer. -(2) A piezoelectric vibrator wafer according to claim 1, which is characterized in that a wafer dividing groove is provided in the outer circumferential work of the wafer. (3) A piezoelectric vibrator wafer according to item 1 of the utility model registration claim, characterized in that a chip dividing groove is provided in the inner workpiece of the wafer. - (4) The piezoelectric vibrator wafer according to claim 1, characterized in that the supporting directions of adjacent chips are 180 degrees opposite to each other. (5) A piezoelectric vibrator wafer according to claim 1, which is characterized in that a vibrator support portion is provided on the internal workpiece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15758981U JPS5864127U (en) | 1981-10-22 | 1981-10-22 | piezoelectric vibrator wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15758981U JPS5864127U (en) | 1981-10-22 | 1981-10-22 | piezoelectric vibrator wafer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5864127U true JPS5864127U (en) | 1983-04-30 |
Family
ID=29950110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15758981U Pending JPS5864127U (en) | 1981-10-22 | 1981-10-22 | piezoelectric vibrator wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5864127U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007181072A (en) * | 2005-12-28 | 2007-07-12 | Citizen Miyota Co Ltd | Method for manufacturing piezoelectric device, and piezoelectric device |
| JP2010226573A (en) * | 2009-03-25 | 2010-10-07 | Nec Tokin Corp | Piezoelectric tuning-fork vibrator and method of manufacturing the same |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56823A (en) * | 1979-04-26 | 1981-01-07 | Gen Electric | Manufacture of copolyester carbonate |
| JPS56822A (en) * | 1979-04-26 | 1981-01-07 | Gen Electric | Manufacture of copolyester carbonate |
-
1981
- 1981-10-22 JP JP15758981U patent/JPS5864127U/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56823A (en) * | 1979-04-26 | 1981-01-07 | Gen Electric | Manufacture of copolyester carbonate |
| JPS56822A (en) * | 1979-04-26 | 1981-01-07 | Gen Electric | Manufacture of copolyester carbonate |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007181072A (en) * | 2005-12-28 | 2007-07-12 | Citizen Miyota Co Ltd | Method for manufacturing piezoelectric device, and piezoelectric device |
| JP2010226573A (en) * | 2009-03-25 | 2010-10-07 | Nec Tokin Corp | Piezoelectric tuning-fork vibrator and method of manufacturing the same |
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