JPS5950442U

JPS5950442U - wafer holder

Info

Publication number: JPS5950442U
Application number: JP14738782U
Authority: JP
Inventors: 武部　朋子; 門脇　好伸
Original assignee: 三菱電機株式会社
Priority date: 1982-09-27
Filing date: 1982-09-27
Publication date: 1984-04-03

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図〜第３図は何れも従来のウェハホルダを示すもの
で、第１図は斜視図、第２図は第１図の■−■線におけ
る断面図、第３図は金属薄膜を真空蒸着すべきウェハを
載着した状態を示す断面図である。第４図〜第９図は何
れもこの考案の一実、雄側を示すもので、第４図は可動
支持片を有するウェハホルダの平面図、第５図は第４図
の■−■線における断面図、第６図は可動支持片をウェ
ハホルダの中心に向って伸長させた状態を示す平面図、
第７図は第６図の■−■線における断面図、第８図は可
動支持片に真空蒸着すべきウェハを載置した状態を示す
平面図、第９図は第８図の■−■線における断面図であ
る。第１０図Ａ、　Ｂ、　Ｃは何れもこの考案の他の実
施例を示すもので、第１０図Ａは可動支持片を支持ピン
によってウェハホルダに回動自在に保持させるようにし
た状態を示す平面図、第１０図Ｂは可動支持片の自由端
部をウェハホルダの中心に向って回動させた状態を示す
平面図、第１０図Ｃはウェハホルダにウェハを載置した
状態を示す平面図である。図面中、２はウェハ、３は可動支持片、３ａは切欠き段
部、３ｂは支持ピン、４はウェハホルダ、４ａは保持溝
である。なお、図中同一符号は同一または相当部分を示
す。ユ第３図 ′、。Figures 1 to 3 all show conventional wafer holders; Figure 1 is a perspective view, Figure 2 is a sectional view taken along the line ■-■ in Figure 1, and Figure 3 is a thin metal film deposited by vacuum evaporation. FIG. Figures 4 to 9 all show the male side of this invention. Figure 4 is a plan view of a wafer holder with a movable support piece, and Figure 5 is taken along the line ■-■ in Figure 4. 6 is a sectional view, and FIG. 6 is a plan view showing a state in which the movable support piece is extended toward the center of the wafer holder.
FIG. 7 is a sectional view taken along the line ■-■ in FIG. 6, FIG. 8 is a plan view showing a state in which a wafer to be vacuum-deposited is placed on a movable support piece, and FIG. 9 is a cross-sectional view taken along the line ■-■ in FIG. FIG. 10A, B, and C all show other embodiments of this invention, and FIG. 10A is a plane view showing a state in which the movable support piece is rotatably held on the wafer holder by a support pin. 10B is a plan view showing a state in which the free end of the movable support piece is rotated toward the center of the wafer holder, and FIG. 10C is a plan view showing a state in which a wafer is placed on the wafer holder. . In the drawings, 2 is a wafer, 3 is a movable support piece, 3a is a notch step, 3b is a support pin, 4 is a wafer holder, and 4a is a holding groove. Note that the same reference numerals in the figures indicate the same or corresponding parts. Figure 3'.

Claims

[Scope of utility model registration request]

(1) A wafer holder characterized in that the annular wafer holder holds a plurality of movable support pieces on which wafers to be vacuum-deposited with metal thin films are placed, so as to be movable in the radial direction toward the center of the ring-shaped wafer holder.

(2) In the retaining groove formed on the inner peripheral surface of the Ukoever holder,
A wafer holder according to claim 1, characterized in that a plurality of movable support pieces are held so as to be movable and adjustable in a radial direction.

(3) The wafer holder according to claim 1, wherein the wafer holder rotatably holds a plurality of movable support pieces using holding pins.

(4) Utility model registration claim 1, characterized in that each movable support piece is formed with a stepped notch on which a wafer is placed.
Wafer holder described in section.