JPS5911440U - Wafer etching jig - Google Patents
Wafer etching jigInfo
- Publication number
- JPS5911440U JPS5911440U JP10660682U JP10660682U JPS5911440U JP S5911440 U JPS5911440 U JP S5911440U JP 10660682 U JP10660682 U JP 10660682U JP 10660682 U JP10660682 U JP 10660682U JP S5911440 U JPS5911440 U JP S5911440U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- wafer etching
- etching jig
- jig
- support plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のウェハエツチング用治具を示す断面図、
第２図はこの考案に係るウェハエツチング用治具の一実
施例を示す断面図である。
１・・・・・・ピンセット、２・・・・・・支え板、３
・・・・・・ウェハ、４・・・・・・支え板、４ａ・・
・・・・窓、５・・・・・・第２支え板、６・・・・・
・連結板、７・・・・・・止めねじ。なお、図中、同一
符号は同一または相当部分を示す。Figure 1 is a sectional view showing a conventional wafer etching jig.
FIG. 2 is a sectional view showing an embodiment of the wafer etching jig according to this invention. 1... Tweezers, 2... Support plate, 3
...Wafer, 4...Support plate, 4a...
...Window, 5...Second support plate, 6...
・Connecting plate, 7... Set screw. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
はさんで保持し、ウェハをエツチングするウェハエツチ
ング用治具において、前記支え板にウェハサイズより少
し小さい開閉可能な窓を設けてなるウェハエツチング用
治具。A wafer etching jig in which the wafer is etched by holding the front surface of the wafer with tweezers and the back surface of the wafer between support plates, in which the support plate is provided with an openable/closable window slightly smaller than the wafer size. jig.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10660682U JPS5911440U (en) | 1982-07-12 | 1982-07-12 | Wafer etching jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10660682U JPS5911440U (en) | 1982-07-12 | 1982-07-12 | Wafer etching jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5911440U true JPS5911440U (en) | 1984-01-24 |
Family
ID=30249408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10660682U Pending JPS5911440U (en) | 1982-07-12 | 1982-07-12 | Wafer etching jig |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5911440U (en) |
-
1982
- 1982-07-12 JP JP10660682U patent/JPS5911440U/en active Pending
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