JPS6013742U - Wafer support moving device - Google Patents

Wafer support moving device

Info

Publication number
JPS6013742U
JPS6013742U JP10605783U JP10605783U JPS6013742U JP S6013742 U JPS6013742 U JP S6013742U JP 10605783 U JP10605783 U JP 10605783U JP 10605783 U JP10605783 U JP 10605783U JP S6013742 U JPS6013742 U JP S6013742U
Authority
JP
Japan
Prior art keywords
moving device
wafer support
support moving
metal fitting
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10605783U
Other languages
Japanese (ja)
Other versions
JPS6322675Y2 (en
Inventor
敦弘 筑根
Original Assignee
富士通株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士通株式会社 filed Critical 富士通株式会社
Priority to JP10605783U priority Critical patent/JPS6013742U/en
Publication of JPS6013742U publication Critical patent/JPS6013742U/en
Application granted granted Critical
Publication of JPS6322675Y2 publication Critical patent/JPS6322675Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来のウェーハ挟持移動具、第２図及び第３図
は本考案の一実施例のウェーハ移動具の平面図及び正面
図である。図において２０はウェーハ挾持移動具、２１
は移動支持板、２２は摺動桿、２３はＴ字状金具、２４
は連結金具、２５は挟持金具、２６．２８は爪、２７は
固定挟持金具、２９．３０はガイド押え金具を示す。FIG. 1 is a conventional wafer holding and moving device, and FIGS. 2 and 3 are a plan view and a front view of a wafer moving device according to an embodiment of the present invention. In the figure, 20 is a wafer holding moving tool; 21
2 is a moving support plate, 22 is a sliding rod, 23 is a T-shaped metal fitting, 24
25 is a connecting metal fitting, 25 is a clamping metal fitting, 26.28 is a claw, 27 is a fixed clamping metal fitting, and 29.30 is a guide holding metal fitting.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ウェーハの挾持移動具を、摺動金具と、該摺動金具の支
持板とで構成し、該支持板上で前記摺動金具を摺動せし
めてウェーハを挟持、離脱するようにしたことを特徴と
するウェーハ挟持移動具。The wafer holding and moving tool is composed of a sliding metal fitting and a support plate for the sliding metal fitting, and the sliding metal fitting is slid on the support plate to grip and release the wafer. A wafer holding and moving tool.
JP10605783U 1983-07-07 1983-07-07 Wafer support moving device Granted JPS6013742U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10605783U JPS6013742U (en) 1983-07-07 1983-07-07 Wafer support moving device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10605783U JPS6013742U (en) 1983-07-07 1983-07-07 Wafer support moving device

Publications (2)

Publication Number Publication Date
JPS6013742U true JPS6013742U (en) 1985-01-30
JPS6322675Y2 JPS6322675Y2 (en) 1988-06-22

Family

ID=30248349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10605783U Granted JPS6013742U (en) 1983-07-07 1983-07-07 Wafer support moving device

Country Status (1)

Country Link
JP (1) JPS6013742U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5318389A (en) * 1976-08-04 1978-02-20 Matsushita Electric Ind Co Ltd Wafer holding and handling device
JPS5364362A (en) * 1976-11-22 1978-06-08 Hitachi Ltd Machine hand

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5318389A (en) * 1976-08-04 1978-02-20 Matsushita Electric Ind Co Ltd Wafer holding and handling device
JPS5364362A (en) * 1976-11-22 1978-06-08 Hitachi Ltd Machine hand

Also Published As

Publication number Publication date
JPS6322675Y2 (en) 1988-06-22

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