JPS59169370U - Substrate holder for liquid phase epitaxial film growth - Google Patents
Substrate holder for liquid phase epitaxial film growthInfo
- Publication number
- JPS59169370U JPS59169370U JP6318783U JP6318783U JPS59169370U JP S59169370 U JPS59169370 U JP S59169370U JP 6318783 U JP6318783 U JP 6318783U JP 6318783 U JP6318783 U JP 6318783U JP S59169370 U JPS59169370 U JP S59169370U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- liquid phase
- epitaxial film
- film growth
- phase epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は液相エピタキシャル成長装置の概略断面図、第
２図は本考案の一実施例の側断面図、第３図は前記実施
例の第２図におけるＡ方向よりの矢視図、第４図は前記
実施例の構成を説明するための斜視図、第５図は本考案
による他の実施例の断面図、第６図は前記実施例の中間
保持リングの斜視図である。
１・・・・・・反応管、２・・・・・・ルツボ、３・・
・・・・基板、４・・・・・・基板ホルダ、５・・・・
・・支持軸、４０・・・・・・基板ホルダ本体、４２・
・・・・・保持リング、４２１，４２２・・・・・・中
間保持リング。FIG. 1 is a schematic sectional view of a liquid phase epitaxial growth apparatus, FIG. 2 is a side sectional view of an embodiment of the present invention, FIG. 3 is a view of the embodiment as seen from the direction of arrow A in FIG. FIG. 5 is a perspective view for explaining the structure of the embodiment, FIG. 5 is a sectional view of another embodiment of the present invention, and FIG. 6 is a perspective view of the intermediate retaining ring of the embodiment. 1... Reaction tube, 2... Crucible, 3...
... Board, 4... Board holder, 5...
...Support shaft, 40...Substrate holder body, 42.
...Retaining ring, 421,422...Intermediate holding ring.
Claims (1)
た基板ホルダ本体とこの基板ホルダ本体に嵌め合わされ
る基板保持リングとを有し、前記保持リングと基板ホル
ダ本体とによって基板を挾持しうるようにしたことを特
徴とする液相エピタキシャル膜成長用基板ホルダ。The substrate holder body includes a substrate holder body provided with a mounting portion for attachment to the substrate holder support shaft, and a substrate holding ring fitted to the substrate holder body, so that the substrate can be held between the holding ring and the substrate holder body. A substrate holder for liquid phase epitaxial film growth, which is characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6318783U JPS59169370U (en) | 1983-04-27 | 1983-04-27 | Substrate holder for liquid phase epitaxial film growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6318783U JPS59169370U (en) | 1983-04-27 | 1983-04-27 | Substrate holder for liquid phase epitaxial film growth |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59169370U true JPS59169370U (en) | 1984-11-13 |
| JPS6321577Y2 JPS6321577Y2 (en) | 1988-06-14 |
Family
ID=30193379
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6318783U Granted JPS59169370U (en) | 1983-04-27 | 1983-04-27 | Substrate holder for liquid phase epitaxial film growth |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59169370U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015198213A (en) * | 2014-04-03 | 2015-11-09 | 新日鐵住金株式会社 | Method of manufacturing epitaxial silicon carbide wafer, and holde for silicon carbide single cristal substrate used for the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5114051U (en) * | 1974-07-18 | 1976-02-02 |
-
1983
- 1983-04-27 JP JP6318783U patent/JPS59169370U/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5114051U (en) * | 1974-07-18 | 1976-02-02 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015198213A (en) * | 2014-04-03 | 2015-11-09 | 新日鐵住金株式会社 | Method of manufacturing epitaxial silicon carbide wafer, and holde for silicon carbide single cristal substrate used for the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6321577Y2 (en) | 1988-06-14 |
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