JPS5892729U - semiconductor manufacturing equipment - Google Patents

semiconductor manufacturing equipment

Info

Publication number
JPS5892729U
JPS5892729U JP18848681U JP18848681U JPS5892729U JP S5892729 U JPS5892729 U JP S5892729U JP 18848681 U JP18848681 U JP 18848681U JP 18848681 U JP18848681 U JP 18848681U JP S5892729 U JPS5892729 U JP S5892729U
Authority
JP
Japan
Prior art keywords
semiconductor manufacturing
manufacturing equipment
motherboard
quartz
reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18848681U
Other languages
Japanese (ja)
Other versions
JPS6221001Y2 (en
Inventor
邦夫 佐々木
Original Assignee
山形日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 山形日本電気株式会社 filed Critical 山形日本電気株式会社
Priority to JP18848681U priority Critical patent/JPS5892729U/en
Publication of JPS5892729U publication Critical patent/JPS5892729U/en
Application granted granted Critical
Publication of JPS6221001Y2 publication Critical patent/JPS6221001Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来の石英コロ付マザーボートを示す断面図、
第２図は本考案の一実施例を示すＳｉＣ入り石英コロ付
マザーボードを示す断面図である。 １・・・・・・マザーボート人出炉時の引き出し棒引っ
かけ部、２・・・・・・石英コロ、３・・曲石英ムク棒
、４　　゛・・・・・・石英パイプ、５・・・・・・Ｓ
ｉＣムク棒、６・・・用真空引き口。Figure 1 is a sectional view showing a conventional motherboard with quartz rollers.
FIG. 2 is a sectional view showing a motherboard with SiC-containing quartz rollers showing an embodiment of the present invention. 1...Mother boat pull-out rod hook when taking out the furnace, 2...Quartz roller, 3...Curved quartz bar, 4゛...Quartz pipe, 5... ...S
Vacuum opening for iC bar, 6...

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 反応炉の中へ半導体ウェハーを出し入れするためのマザ
ーボードに、内部にＳｉＣ棒を有する石英パイプを用い
たことを特徴とする半導体製造装置。A semiconductor manufacturing device characterized in that a quartz pipe having an SiC rod inside is used as a motherboard for taking semiconductor wafers into and out of a reactor.
JP18848681U 1981-12-17 1981-12-17 semiconductor manufacturing equipment Granted JPS5892729U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18848681U JPS5892729U (en) 1981-12-17 1981-12-17 semiconductor manufacturing equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18848681U JPS5892729U (en) 1981-12-17 1981-12-17 semiconductor manufacturing equipment

Publications (2)

Publication Number Publication Date
JPS5892729U true JPS5892729U (en) 1983-06-23
JPS6221001Y2 JPS6221001Y2 (en) 1987-05-28

Family

ID=29992095

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18848681U Granted JPS5892729U (en) 1981-12-17 1981-12-17 semiconductor manufacturing equipment

Country Status (1)

Country Link
JP (1) JPS5892729U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02283015A (en) * 1989-04-25 1990-11-20 Shinetsu Sekiei Kk Quarts glass body for semiconductor manufacturing equipment or jig

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5215168U (en) * 1975-07-21 1977-02-02
JPS52145771U (en) * 1976-04-27 1977-11-04
JPS5699851U (en) * 1979-12-27 1981-08-06

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5215168B2 (en) * 1971-11-30 1977-04-27

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5215168U (en) * 1975-07-21 1977-02-02
JPS52145771U (en) * 1976-04-27 1977-11-04
JPS5699851U (en) * 1979-12-27 1981-08-06

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02283015A (en) * 1989-04-25 1990-11-20 Shinetsu Sekiei Kk Quarts glass body for semiconductor manufacturing equipment or jig

Also Published As

Publication number Publication date
JPS6221001Y2 (en) 1987-05-28

Similar Documents

Publication Publication Date Title
JPS5326539A (en) Data exchenge system
JPS5892729U (en) semiconductor manufacturing equipment
JPS5856439U (en) Wafer transfer device
JPS60114303U (en) guide device
JPS58175285U (en) Insulation mounting structure for high-temperature fluid pipes
JPS5812938U (en) semiconductor wafer
JPS5948052U (en) Wafer transfer device
JPS60181025U (en) Boat for heat treatment of semiconductor device substrates
JPS60124032U (en) Vertical furnace for semiconductor wafer processing
JPS58111268U (en) Aquarium stopper device
JPS58128980U (en) Surface treatment mask
JPS59103436U (en) Boat for semiconductor wafers
JPS59182932U (en) Wafer transfer device
JPS5897583U (en) Structure of push button mounting part
JPS5926238U (en) CVD equipment
JPS6071639U (en) Glass melting furnace off-gas piping unblocking device
JPS58142472U (en) Wall penetration structure of piping for high temperature fluid
JPS60150391U (en) scalene elbow
JPS5926250U (en) lock valve device
JPS58148016U (en) Pants for pajamas
JPS6094824U (en) semiconductor manufacturing equipment
JPS59119031U (en) Diffusion device
JPS5921860U (en) Overflow pipe water stop valve
JPS59108027U (en) Exhaust pipe connection device
JPS5845987U (en) Automatic vacuum exhaust system switching mechanism