JPS5961531U - Liquid phase epitaxial growth equipment - Google Patents

Liquid phase epitaxial growth equipment

Info

Publication number
JPS5961531U
JPS5961531U JP15767582U JP15767582U JPS5961531U JP S5961531 U JPS5961531 U JP S5961531U JP 15767582 U JP15767582 U JP 15767582U JP 15767582 U JP15767582 U JP 15767582U JP S5961531 U JPS5961531 U JP S5961531U
Authority
JP
Japan
Prior art keywords
epitaxial growth
liquid phase
phase epitaxial
boat
growth equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15767582U
Other languages
Japanese (ja)
Other versions
JPH025529Y2 (en
Inventor
片山　修治
Original Assignee
三洋電機株式会社
鳥取三洋電機株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 三洋電機株式会社, 鳥取三洋電機株式会社 filed Critical 三洋電機株式会社
Priority to JP15767582U priority Critical patent/JPS5961531U/en
Publication of JPS5961531U publication Critical patent/JPS5961531U/en
Application granted granted Critical
Publication of JPH025529Y2 publication Critical patent/JPH025529Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は従来のエピタキシャル装置め断面図、第２図は
本考案実施例の液相エピタキシャル成長装置の断面図で
ある。 １・・・ボート、２・・・半導体基板、３・・・凹部、
４・・・スライド板、５・・・融液、６・・・融液室。FIG. 1 is a sectional view of a conventional epitaxial growth apparatus, and FIG. 2 is a sectional view of a liquid phase epitaxial growth apparatus according to an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Boat, 2... Semiconductor substrate, 3... Recessed part,
4... Slide plate, 5... Melt liquid, 6... Melt liquid chamber.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 基板を収納する凹部を有したボートと、ボートと相対的
に摺動可能にボー、ト上に載置され、底面をボート表面
で形成し、融液と接する主たる面が粗面となった融液室
をもったスライド板とを具備した事を特徴とする液相エ
ピタキシャル成長装置。A boat has a recess for storing a substrate, and a melt is placed on the boat so as to be able to slide relative to the boat, the bottom surface is formed by the boat surface, and the main surface in contact with the melt is a rough surface. A liquid phase epitaxial growth apparatus characterized by comprising a slide plate having a liquid chamber.
JP15767582U 1982-10-19 1982-10-19 Liquid phase epitaxial growth equipment Granted JPS5961531U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15767582U JPS5961531U (en) 1982-10-19 1982-10-19 Liquid phase epitaxial growth equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15767582U JPS5961531U (en) 1982-10-19 1982-10-19 Liquid phase epitaxial growth equipment

Publications (2)

Publication Number Publication Date
JPS5961531U true JPS5961531U (en) 1984-04-23
JPH025529Y2 JPH025529Y2 (en) 1990-02-09

Family

ID=30347559

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15767582U Granted JPS5961531U (en) 1982-10-19 1982-10-19 Liquid phase epitaxial growth equipment

Country Status (1)

Country Link
JP (1) JPS5961531U (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623956A (en) * 1979-08-01 1981-03-06 Tokyo Electric Co Ltd Automatic electric moxa cautery device
JPS58138330U (en) * 1982-03-11 1983-09-17 日本電気株式会社 Liquid phase epitaxial growth equipment

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623956A (en) * 1979-08-01 1981-03-06 Tokyo Electric Co Ltd Automatic electric moxa cautery device
JPS58138330U (en) * 1982-03-11 1983-09-17 日本電気株式会社 Liquid phase epitaxial growth equipment

Also Published As

Publication number Publication date
JPH025529Y2 (en) 1990-02-09

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