JPS5950437U - Liquid phase epitaxial growth equipment - Google Patents
Liquid phase epitaxial growth equipmentInfo
- Publication number
- JPS5950437U JPS5950437U JP14577382U JP14577382U JPS5950437U JP S5950437 U JPS5950437 U JP S5950437U JP 14577382 U JP14577382 U JP 14577382U JP 14577382 U JP14577382 U JP 14577382U JP S5950437 U JPS5950437 U JP S5950437U
- Authority
- JP
- Japan
- Prior art keywords
- liquid phase
- epitaxial growth
- phase epitaxial
- growth equipment
- slider
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は、従来技術における液相エピタキシャル成長装
置のスライダとポートとの基本構造の一例を示す装置の
断面図であり、゛第２図は、本考案の実施例に係る液相
エピタキシャル成長装置のスライダとポートとの構造を
示す装置の断面図、第３図は本考案にかかるスライダカ
バーの構成を示す平面図である。
１１．２１・・・ポート、１２．２２・・・基板、１３
゜２３・・・スライダ、１４．１４’、１４“、２４・
・・メルト、１５・・・従来技術における液相エピタキ
どヤル成長装置のスライダ開口部用カバー、２５・・・
本発明の一実施例に係る液相エピタキシャル成長装置の
スライダ開口部用カバー、２５′・・・スライダ開口部
用カバーの底面に設けられた突起。FIG. 1 is a sectional view of an apparatus showing an example of the basic structure of a slider and a port of a liquid phase epitaxial growth apparatus in the prior art, and FIG. FIG. 3 is a sectional view of the device showing the structure of the slider cover and the port, and FIG. 3 is a plan view showing the structure of the slider cover according to the present invention. 11.21... Port, 12.22... Board, 13
゜23...Slider, 14.14', 14", 24.
... Melt, 15... Cover for slider opening of liquid phase epitaxial growth apparatus in prior art, 25...
Slider opening cover of a liquid phase epitaxial growth apparatus according to an embodiment of the present invention, 25'...Protrusion provided on the bottom surface of the slider opening cover.
Claims (1)
の突起が設けられてなるスライダを有することを特徴と
する液相エピタキシャル成長装置。A liquid phase epitaxial growth apparatus comprising a slider having a downwardly convex projection on the bottom surface of a cover that covers an opening for containing a melt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14577382U JPS5950437U (en) | 1982-09-27 | 1982-09-27 | Liquid phase epitaxial growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14577382U JPS5950437U (en) | 1982-09-27 | 1982-09-27 | Liquid phase epitaxial growth equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5950437U true JPS5950437U (en) | 1984-04-03 |
Family
ID=30324680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14577382U Pending JPS5950437U (en) | 1982-09-27 | 1982-09-27 | Liquid phase epitaxial growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5950437U (en) |
-
1982
- 1982-09-27 JP JP14577382U patent/JPS5950437U/en active Pending
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