JPS58138330U - Liquid phase epitaxial growth equipment - Google Patents
Liquid phase epitaxial growth equipmentInfo
- Publication number
- JPS58138330U JPS58138330U JP3440182U JP3440182U JPS58138330U JP S58138330 U JPS58138330 U JP S58138330U JP 3440182 U JP3440182 U JP 3440182U JP 3440182 U JP3440182 U JP 3440182U JP S58138330 U JPS58138330 U JP S58138330U
- Authority
- JP
- Japan
- Prior art keywords
- epitaxial growth
- liquid phase
- phase epitaxial
- growth equipment
- carbon boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図及び第２図は従来の液相エピタキシャル成長装置
の断面図。第３図は本考案の液相エピタキシャル成長装
置の断面図。第４図は本考案の液相エピタキシャル成長
装置の表面に形成された溝の断面図。第５図は本考案の
液相エピタキシャル成長装置の実施例の断面図。第６図
第７図は上記実施例の装置のスライド板の表面図である
。
各図において、１及び１１・・・・・・エピタキシャル
溶液、２，１２及び２２・・・・・・カーボンボート本
体、２ａ、１２ａ及び２２ａ・・・・・・溶液つぼ、４
，１４及び２４・・・・・・スライド板である。1 and 2 are cross-sectional views of a conventional liquid phase epitaxial growth apparatus. FIG. 3 is a sectional view of the liquid phase epitaxial growth apparatus of the present invention. FIG. 4 is a cross-sectional view of grooves formed on the surface of the liquid phase epitaxial growth apparatus of the present invention. FIG. 5 is a sectional view of an embodiment of the liquid phase epitaxial growth apparatus of the present invention. 6 and 7 are surface views of the slide plate of the apparatus of the above embodiment. In each figure, 1 and 11... epitaxial solution, 2, 12 and 22... carbon boat body, 2a, 12a and 22a... solution pot, 4
, 14 and 24... slide plates.
Claims (1)
少なくとも結晶成長終了後のカーボンボート冷却時にエ
ピタキシャル溶液が接している部分に多数の溝を形成し
たことを特徴とするエピタキシャル成長装置。Of the carbon boat surface for liquid phase epitaxial growth,
An epitaxial growth apparatus characterized in that a large number of grooves are formed at least in a portion that is in contact with an epitaxial solution during cooling of the carbon boat after completion of crystal growth.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3440182U JPS58138330U (en) | 1982-03-11 | 1982-03-11 | Liquid phase epitaxial growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3440182U JPS58138330U (en) | 1982-03-11 | 1982-03-11 | Liquid phase epitaxial growth equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58138330U true JPS58138330U (en) | 1983-09-17 |
| JPH0438517Y2 JPH0438517Y2 (en) | 1992-09-09 |
Family
ID=30045884
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3440182U Granted JPS58138330U (en) | 1982-03-11 | 1982-03-11 | Liquid phase epitaxial growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58138330U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5961531U (en) * | 1982-10-19 | 1984-04-23 | 三洋電機株式会社 | Liquid phase epitaxial growth equipment |
| JPS61186233U (en) * | 1985-05-13 | 1986-11-20 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5792598A (en) * | 1980-11-26 | 1982-06-09 | Fujitsu Ltd | Unit for liquid-phase epitaxial growth |
-
1982
- 1982-03-11 JP JP3440182U patent/JPS58138330U/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5792598A (en) * | 1980-11-26 | 1982-06-09 | Fujitsu Ltd | Unit for liquid-phase epitaxial growth |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5961531U (en) * | 1982-10-19 | 1984-04-23 | 三洋電機株式会社 | Liquid phase epitaxial growth equipment |
| JPS61186233U (en) * | 1985-05-13 | 1986-11-20 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0438517Y2 (en) | 1992-09-09 |
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