JPS61186233U - - Google Patents
Info
- Publication number
- JPS61186233U JPS61186233U JP7023185U JP7023185U JPS61186233U JP S61186233 U JPS61186233 U JP S61186233U JP 7023185 U JP7023185 U JP 7023185U JP 7023185 U JP7023185 U JP 7023185U JP S61186233 U JPS61186233 U JP S61186233U
- Authority
- JP
- Japan
- Prior art keywords
- slider
- holds
- holding tank
- growth
- bathtub part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000007791 liquid phase Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は本考案の一実施例による縦断面図、第
２図は、本考案の一実施例に用いる本体底部の拡
大断面図である。第３図は従来の液相成長治具の
横断面図である。
１……本体部、２……スライダー、３……浴槽
部、４……本体部の底部、５，５′……溶液、６
……半導体基板、７……貫通穴、８……廃液。
FIG. 1 is a longitudinal cross-sectional view of an embodiment of the present invention, and FIG. 2 is an enlarged cross-sectional view of the bottom of the main body used in the embodiment of the present invention. FIG. 3 is a cross-sectional view of a conventional liquid phase growth jig. 1... Body part, 2... Slider, 3... Bathtub part, 4... Bottom of main body part, 5, 5'... Solution, 6
...Semiconductor substrate, 7...Through hole, 8...Waste liquid.
Claims (1)
する浴槽部と、該浴槽部の底面を成長基板を載置
して摺動するスライダーと、これら浴槽部とスラ
イダーとを保持、固定し、底部に成長終了後の溶
液の保持槽を有する本体部とを有し、該保持槽の
底面に同一方向に複数条の小溝を有することを特
徴とする半導体液相成長治具。 A bathtub part that holds a solution necessary for semiconductor epitaxial growth, a slider that slides a growth substrate on the bottom of the bathtub part, and a slider that holds and fixes the bathtub part and the slider, and the growth substrate is placed on the bottom part 1. A semiconductor liquid phase growth jig, comprising: a main body having a holding tank for a subsequent solution; and a plurality of small grooves extending in the same direction on the bottom surface of the holding tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985070231U JPH0517878Y2 (en) | 1985-05-13 | 1985-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985070231U JPH0517878Y2 (en) | 1985-05-13 | 1985-05-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61186233U true JPS61186233U (en) | 1986-11-20 |
| JPH0517878Y2 JPH0517878Y2 (en) | 1993-05-13 |
Family
ID=30606641
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985070231U Expired - Lifetime JPH0517878Y2 (en) | 1985-05-13 | 1985-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0517878Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58120600A (en) * | 1981-12-31 | 1983-07-18 | ウエスタ−ン・エレクトリツク・カムパニ−・インコ−ポレ−テツド | Epitaxial growth method of 2-5 family compound semiconductor |
| JPS58138330U (en) * | 1982-03-11 | 1983-09-17 | 日本電気株式会社 | Liquid phase epitaxial growth equipment |
-
1985
- 1985-05-13 JP JP1985070231U patent/JPH0517878Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58120600A (en) * | 1981-12-31 | 1983-07-18 | ウエスタ−ン・エレクトリツク・カムパニ−・インコ−ポレ−テツド | Epitaxial growth method of 2-5 family compound semiconductor |
| JPS58138330U (en) * | 1982-03-11 | 1983-09-17 | 日本電気株式会社 | Liquid phase epitaxial growth equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0517878Y2 (en) | 1993-05-13 |