JPS59115638U - Source board for vapor phase growth - Google Patents
Source board for vapor phase growthInfo
- Publication number
- JPS59115638U JPS59115638U JP807683U JP807683U JPS59115638U JP S59115638 U JPS59115638 U JP S59115638U JP 807683 U JP807683 U JP 807683U JP 807683 U JP807683 U JP 807683U JP S59115638 U JPS59115638 U JP S59115638U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- source board
- lid
- board
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来のソースポードの構造図で、１はソースボ
ード支持棒、２は成長用ガスの通路、３はエツチング用
ガス通路、４はソースボード、５はソースポードのフタ
、６はフタ固定突起、７はガリウムである。Figure 1 is a structural diagram of a conventional source port, where 1 is a source board support rod, 2 is a growth gas passage, 3 is an etching gas passage, 4 is a source board, 5 is a source port lid, and 6 is a lid fixing protrusion. , 7 is gallium.
Claims (1)
と接続された支持棒にフタの内壁と同じ勾配をもたせた
フタ固定用支持台を接続したことを特徴とする気相成長
用ソースボード。A source board for compound semiconductor vapor phase growth, characterized in that a support for fixing a lid having the same slope as the inner wall of the lid is connected to a support rod connected to the board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP807683U JPS59115638U (en) | 1983-01-24 | 1983-01-24 | Source board for vapor phase growth |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP807683U JPS59115638U (en) | 1983-01-24 | 1983-01-24 | Source board for vapor phase growth |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59115638U true JPS59115638U (en) | 1984-08-04 |
Family
ID=30139583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP807683U Pending JPS59115638U (en) | 1983-01-24 | 1983-01-24 | Source board for vapor phase growth |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59115638U (en) |
-
1983
- 1983-01-24 JP JP807683U patent/JPS59115638U/en active Pending
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