JPS5396758A - Vapor phase growth apparatus - Google Patents
Vapor phase growth apparatusInfo
- Publication number
- JPS5396758A JPS5396758A JP1179377A JP1179377A JPS5396758A JP S5396758 A JPS5396758 A JP S5396758A JP 1179377 A JP1179377 A JP 1179377A JP 1179377 A JP1179377 A JP 1179377A JP S5396758 A JPS5396758 A JP S5396758A
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- growth apparatus
- vapor growth
- high frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE: To always maintain tube walls clean and make possible vapor growth under both reduced pressure and atmospheric pressure by providing a reaction tube performing vapor growth and plasma generating high frequency electrodes.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1179377A JPS5396758A (en) | 1977-02-04 | 1977-02-04 | Vapor phase growth apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1179377A JPS5396758A (en) | 1977-02-04 | 1977-02-04 | Vapor phase growth apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5396758A true JPS5396758A (en) | 1978-08-24 |
Family
ID=11787781
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1179377A Pending JPS5396758A (en) | 1977-02-04 | 1977-02-04 | Vapor phase growth apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5396758A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56152231A (en) * | 1980-04-25 | 1981-11-25 | Mitsubishi Electric Corp | Method and device for cleaning gas pipe |
JPS62196820A (en) * | 1986-02-25 | 1987-08-31 | Furendo Tec Kenkyusho:Kk | Production equipment for semiconductor device and washing method thereof |
-
1977
- 1977-02-04 JP JP1179377A patent/JPS5396758A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56152231A (en) * | 1980-04-25 | 1981-11-25 | Mitsubishi Electric Corp | Method and device for cleaning gas pipe |
JPS62196820A (en) * | 1986-02-25 | 1987-08-31 | Furendo Tec Kenkyusho:Kk | Production equipment for semiconductor device and washing method thereof |
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