JPS5396758A - Vapor phase growth apparatus - Google Patents

Vapor phase growth apparatus

Info

Publication number
JPS5396758A
JPS5396758A JP1179377A JP1179377A JPS5396758A JP S5396758 A JPS5396758 A JP S5396758A JP 1179377 A JP1179377 A JP 1179377A JP 1179377 A JP1179377 A JP 1179377A JP S5396758 A JPS5396758 A JP S5396758A
Authority
JP
Japan
Prior art keywords
vapor phase
phase growth
growth apparatus
vapor growth
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1179377A
Other languages
Japanese (ja)
Inventor
Akira Nishimoto
Haruhiko Abe
Natsuo Tsubouchi
Hirokazu Miyoshi
Kuniaki Miyake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1179377A priority Critical patent/JPS5396758A/en
Publication of JPS5396758A publication Critical patent/JPS5396758A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

PURPOSE: To always maintain tube walls clean and make possible vapor growth under both reduced pressure and atmospheric pressure by providing a reaction tube performing vapor growth and plasma generating high frequency electrodes.
COPYRIGHT: (C)1978,JPO&Japio
JP1179377A 1977-02-04 1977-02-04 Vapor phase growth apparatus Pending JPS5396758A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1179377A JPS5396758A (en) 1977-02-04 1977-02-04 Vapor phase growth apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1179377A JPS5396758A (en) 1977-02-04 1977-02-04 Vapor phase growth apparatus

Publications (1)

Publication Number Publication Date
JPS5396758A true JPS5396758A (en) 1978-08-24

Family

ID=11787781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1179377A Pending JPS5396758A (en) 1977-02-04 1977-02-04 Vapor phase growth apparatus

Country Status (1)

Country Link
JP (1) JPS5396758A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56152231A (en) * 1980-04-25 1981-11-25 Mitsubishi Electric Corp Method and device for cleaning gas pipe
JPS62196820A (en) * 1986-02-25 1987-08-31 Furendo Tec Kenkyusho:Kk Production equipment for semiconductor device and washing method thereof

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56152231A (en) * 1980-04-25 1981-11-25 Mitsubishi Electric Corp Method and device for cleaning gas pipe
JPS62196820A (en) * 1986-02-25 1987-08-31 Furendo Tec Kenkyusho:Kk Production equipment for semiconductor device and washing method thereof

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