JPS52121883A - Jet cutting method - Google Patents

Jet cutting method

Info

Publication number
JPS52121883A
JPS52121883A JP3849076A JP3849076A JPS52121883A JP S52121883 A JPS52121883 A JP S52121883A JP 3849076 A JP3849076 A JP 3849076A JP 3849076 A JP3849076 A JP 3849076A JP S52121883 A JPS52121883 A JP S52121883A
Authority
JP
Japan
Prior art keywords
cutting method
jet cutting
work
high pressure
pressure liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3849076A
Other languages
Japanese (ja)
Inventor
Masaaki Kuniyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3849076A priority Critical patent/JPS52121883A/en
Publication of JPS52121883A publication Critical patent/JPS52121883A/en
Pending legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)

Abstract

PURPOSE: To provide a cutting method to obtain a cutting face generating no work-affected zone by using high pressure liquid.
COPYRIGHT: (C)1977,JPO&Japio
JP3849076A 1976-04-06 1976-04-06 Jet cutting method Pending JPS52121883A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3849076A JPS52121883A (en) 1976-04-06 1976-04-06 Jet cutting method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3849076A JPS52121883A (en) 1976-04-06 1976-04-06 Jet cutting method

Publications (1)

Publication Number Publication Date
JPS52121883A true JPS52121883A (en) 1977-10-13

Family

ID=12526693

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3849076A Pending JPS52121883A (en) 1976-04-06 1976-04-06 Jet cutting method

Country Status (1)

Country Link
JP (1) JPS52121883A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01310542A (en) * 1988-04-01 1989-12-14 Westinghouse Electric Corp <We> Machine cutting silicon dendrite webb automatically
JP2000223383A (en) * 1999-02-02 2000-08-11 Canon Inc Separating device, separating method and manufacture of semiconductor substrate

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01310542A (en) * 1988-04-01 1989-12-14 Westinghouse Electric Corp <We> Machine cutting silicon dendrite webb automatically
JP2000223383A (en) * 1999-02-02 2000-08-11 Canon Inc Separating device, separating method and manufacture of semiconductor substrate

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