JPS53108790A - Production of capacity element - Google Patents
Production of capacity elementInfo
- Publication number
- JPS53108790A JPS53108790A JP2419977A JP2419977A JPS53108790A JP S53108790 A JPS53108790 A JP S53108790A JP 2419977 A JP2419977 A JP 2419977A JP 2419977 A JP2419977 A JP 2419977A JP S53108790 A JPS53108790 A JP S53108790A
- Authority
- JP
- Japan
- Prior art keywords
- production
- film
- capacity element
- forming
- capacities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: To produce a multiplicity of capacities of uniform characteristics by forming an insulation film, selectively forming anodic-oxidized films and evaporating a metal film or semiconductor film thereafter removing the insulator film.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2419977A JPS6032357B2 (en) | 1977-03-04 | 1977-03-04 | Manufacturing method of capacitive element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2419977A JPS6032357B2 (en) | 1977-03-04 | 1977-03-04 | Manufacturing method of capacitive element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53108790A true JPS53108790A (en) | 1978-09-21 |
JPS6032357B2 JPS6032357B2 (en) | 1985-07-27 |
Family
ID=12131642
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2419977A Expired JPS6032357B2 (en) | 1977-03-04 | 1977-03-04 | Manufacturing method of capacitive element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6032357B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58200566A (en) * | 1982-04-30 | 1983-11-22 | エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン | Method of producing semiconductor device |
JPS5978553A (en) * | 1982-10-27 | 1984-05-07 | Hitachi Ltd | Capacitor and manufacture thereof |
US6992368B2 (en) | 2001-01-17 | 2006-01-31 | International Business Machines Corporation | Production of metal insulator metal (MIM) structures using anodizing process |
-
1977
- 1977-03-04 JP JP2419977A patent/JPS6032357B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58200566A (en) * | 1982-04-30 | 1983-11-22 | エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン | Method of producing semiconductor device |
JPS5978553A (en) * | 1982-10-27 | 1984-05-07 | Hitachi Ltd | Capacitor and manufacture thereof |
US6992368B2 (en) | 2001-01-17 | 2006-01-31 | International Business Machines Corporation | Production of metal insulator metal (MIM) structures using anodizing process |
Also Published As
Publication number | Publication date |
---|---|
JPS6032357B2 (en) | 1985-07-27 |
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