JPS5318964A - X-ray projection and exposure system - Google Patents
X-ray projection and exposure systemInfo
- Publication number
- JPS5318964A JPS5318964A JP9322976A JP9322976A JPS5318964A JP S5318964 A JPS5318964 A JP S5318964A JP 9322976 A JP9322976 A JP 9322976A JP 9322976 A JP9322976 A JP 9322976A JP S5318964 A JPS5318964 A JP S5318964A
- Authority
- JP
- Japan
- Prior art keywords
- exposure system
- ray projection
- mask
- ray
- margin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE: To increase the margin of space controlling of a mask and a wafer without decreasing pattern accuracy and without increasing exposure time by inserting an X-ray collimator between an X-ray source and a mask.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9322976A JPS5318964A (en) | 1976-08-06 | 1976-08-06 | X-ray projection and exposure system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9322976A JPS5318964A (en) | 1976-08-06 | 1976-08-06 | X-ray projection and exposure system |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5318964A true JPS5318964A (en) | 1978-02-21 |
JPS5322429B2 JPS5322429B2 (en) | 1978-07-08 |
Family
ID=14076704
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9322976A Granted JPS5318964A (en) | 1976-08-06 | 1976-08-06 | X-ray projection and exposure system |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5318964A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4718076A (en) * | 1983-04-22 | 1988-01-05 | Kabushiki Kaisha Toshiba | X-ray imaging apparatus |
JPH07209876A (en) * | 1995-01-30 | 1995-08-11 | Canon Inc | X-ray transfer device and method |
JP2000098091A (en) * | 1998-09-28 | 2000-04-07 | Rigaku Corp | Solar slit and x-ray device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5826177Y2 (en) * | 1979-08-16 | 1983-06-06 | 共和産業株式会社 | Structure of bearing support part of automobile sun visor |
-
1976
- 1976-08-06 JP JP9322976A patent/JPS5318964A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4718076A (en) * | 1983-04-22 | 1988-01-05 | Kabushiki Kaisha Toshiba | X-ray imaging apparatus |
JPH07209876A (en) * | 1995-01-30 | 1995-08-11 | Canon Inc | X-ray transfer device and method |
JP2000098091A (en) * | 1998-09-28 | 2000-04-07 | Rigaku Corp | Solar slit and x-ray device |
Also Published As
Publication number | Publication date |
---|---|
JPS5322429B2 (en) | 1978-07-08 |
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