JPS5358771A - Electron beam exposure apparatus - Google Patents
Electron beam exposure apparatusInfo
- Publication number
- JPS5358771A JPS5358771A JP13389976A JP13389976A JPS5358771A JP S5358771 A JPS5358771 A JP S5358771A JP 13389976 A JP13389976 A JP 13389976A JP 13389976 A JP13389976 A JP 13389976A JP S5358771 A JPS5358771 A JP S5358771A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- exposure apparatus
- beam exposure
- mask
- poisition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: The deformation and poisition change of a mask are reduced by providing a shading mask above the mask.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13389976A JPS5358771A (en) | 1976-11-08 | 1976-11-08 | Electron beam exposure apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13389976A JPS5358771A (en) | 1976-11-08 | 1976-11-08 | Electron beam exposure apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5358771A true JPS5358771A (en) | 1978-05-26 |
Family
ID=15115697
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13389976A Pending JPS5358771A (en) | 1976-11-08 | 1976-11-08 | Electron beam exposure apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5358771A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS503078U (en) * | 1973-05-07 | 1975-01-13 |
-
1976
- 1976-11-08 JP JP13389976A patent/JPS5358771A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS503078U (en) * | 1973-05-07 | 1975-01-13 |
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