JPS5291361A - Scanning electron microscope - Google Patents
Scanning electron microscopeInfo
- Publication number
- JPS5291361A JPS5291361A JP760576A JP760576A JPS5291361A JP S5291361 A JPS5291361 A JP S5291361A JP 760576 A JP760576 A JP 760576A JP 760576 A JP760576 A JP 760576A JP S5291361 A JPS5291361 A JP S5291361A
- Authority
- JP
- Japan
- Prior art keywords
- electron microscope
- scanning electron
- resolulation
- astigmatism
- deflection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To prevent the deflection of electron beams due to extending electric field by providing a shielding cylinder under a converging lens thereby avoiding generation of astigmatism and reduction in resolulation.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP760576A JPS5291361A (en) | 1976-01-27 | 1976-01-27 | Scanning electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP760576A JPS5291361A (en) | 1976-01-27 | 1976-01-27 | Scanning electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5291361A true JPS5291361A (en) | 1977-08-01 |
Family
ID=11670424
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP760576A Pending JPS5291361A (en) | 1976-01-27 | 1976-01-27 | Scanning electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5291361A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55110908A (en) * | 1979-02-21 | 1980-08-27 | Hitachi Ltd | Measuring device |
JPS60243959A (en) * | 1984-05-18 | 1985-12-03 | Hitachi Ltd | Scanning electron microscope |
US5387793A (en) * | 1992-10-15 | 1995-02-07 | Hitachi, Ltd. | Scanning electron microscope |
-
1976
- 1976-01-27 JP JP760576A patent/JPS5291361A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55110908A (en) * | 1979-02-21 | 1980-08-27 | Hitachi Ltd | Measuring device |
JPS60243959A (en) * | 1984-05-18 | 1985-12-03 | Hitachi Ltd | Scanning electron microscope |
US5387793A (en) * | 1992-10-15 | 1995-02-07 | Hitachi, Ltd. | Scanning electron microscope |
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