JPS5322375A - Beam blanking device - Google Patents

Beam blanking device

Info

Publication number
JPS5322375A
JPS5322375A JP9686476A JP9686476A JPS5322375A JP S5322375 A JPS5322375 A JP S5322375A JP 9686476 A JP9686476 A JP 9686476A JP 9686476 A JP9686476 A JP 9686476A JP S5322375 A JPS5322375 A JP S5322375A
Authority
JP
Japan
Prior art keywords
blanking device
beam blanking
providing
deflecting
blanking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9686476A
Other languages
Japanese (ja)
Other versions
JPS562785B2 (en
Inventor
Susumu Takashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP9686476A priority Critical patent/JPS5322375A/en
Publication of JPS5322375A publication Critical patent/JPS5322375A/en
Publication of JPS562785B2 publication Critical patent/JPS562785B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE: To prevent the beam movement at blanking by providing two deflecting means between a beam receiver and a charged corpuscular ray source and providing a fixed proportional relation between both deflecting angles.
COPYRIGHT: (C)1978,JPO&Japio
JP9686476A 1976-08-13 1976-08-13 Beam blanking device Granted JPS5322375A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9686476A JPS5322375A (en) 1976-08-13 1976-08-13 Beam blanking device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9686476A JPS5322375A (en) 1976-08-13 1976-08-13 Beam blanking device

Publications (2)

Publication Number Publication Date
JPS5322375A true JPS5322375A (en) 1978-03-01
JPS562785B2 JPS562785B2 (en) 1981-01-21

Family

ID=14176305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9686476A Granted JPS5322375A (en) 1976-08-13 1976-08-13 Beam blanking device

Country Status (1)

Country Link
JP (1) JPS5322375A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562730A (en) * 1978-11-02 1980-05-12 Toshiba Corp Electron beam exposure device
JPS57122518A (en) * 1981-01-22 1982-07-30 Toshiba Corp Electro-optical body tube
JPS58137947A (en) * 1982-02-10 1983-08-16 Toshiba Corp Electronic optical mirror tube
JPS6251218A (en) * 1985-08-30 1987-03-05 Hitachi Ltd Electron beam lithography equipment
US4684809A (en) * 1984-09-29 1987-08-04 Kabushiki Kaisha Toshiba Method of adjusting optical column in energy beam exposure system

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5562730A (en) * 1978-11-02 1980-05-12 Toshiba Corp Electron beam exposure device
JPS6238851B2 (en) * 1978-11-02 1987-08-20 Tokyo Shibaura Electric Co
JPS57122518A (en) * 1981-01-22 1982-07-30 Toshiba Corp Electro-optical body tube
JPS58137947A (en) * 1982-02-10 1983-08-16 Toshiba Corp Electronic optical mirror tube
JPH0568847B2 (en) * 1982-02-10 1993-09-29 Toshiba Kk
US4684809A (en) * 1984-09-29 1987-08-04 Kabushiki Kaisha Toshiba Method of adjusting optical column in energy beam exposure system
JPS6251218A (en) * 1985-08-30 1987-03-05 Hitachi Ltd Electron beam lithography equipment
JPH0587014B2 (en) * 1985-08-30 1993-12-15 Hitachi Ltd

Also Published As

Publication number Publication date
JPS562785B2 (en) 1981-01-21

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