JPS545387A - Electron beam deflection scanner - Google Patents
Electron beam deflection scannerInfo
- Publication number
- JPS545387A JPS545387A JP6984477A JP6984477A JPS545387A JP S545387 A JPS545387 A JP S545387A JP 6984477 A JP6984477 A JP 6984477A JP 6984477 A JP6984477 A JP 6984477A JP S545387 A JPS545387 A JP S545387A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- beam deflection
- deflection scanner
- distance
- scanner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To ensure a high-accuracy scanning over a wide area by securing f1< l1<f1+f2 with distance l1 for electronic lens having focal distance f1 and f2 and providing the deflection elemnt distant by l2≈f2 from the objective lens at the intermediate position.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52069844A JPS5820098B2 (en) | 1977-06-15 | 1977-06-15 | Electron beam deflection scanning device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP52069844A JPS5820098B2 (en) | 1977-06-15 | 1977-06-15 | Electron beam deflection scanning device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS545387A true JPS545387A (en) | 1979-01-16 |
JPS5820098B2 JPS5820098B2 (en) | 1983-04-21 |
Family
ID=13414510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP52069844A Expired JPS5820098B2 (en) | 1977-06-15 | 1977-06-15 | Electron beam deflection scanning device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5820098B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5678051A (en) * | 1979-11-30 | 1981-06-26 | Jeol Ltd | Electron beam device |
JP2016051534A (en) * | 2014-08-29 | 2016-04-11 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53117387A (en) * | 1977-03-23 | 1978-10-13 | Western Electric Co | Method of forming high resolution fine pattern at high speed |
JPS53140963A (en) * | 1977-05-16 | 1978-12-08 | Jeol Ltd | Scanning electronic microscope |
-
1977
- 1977-06-15 JP JP52069844A patent/JPS5820098B2/en not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS53117387A (en) * | 1977-03-23 | 1978-10-13 | Western Electric Co | Method of forming high resolution fine pattern at high speed |
JPS53140963A (en) * | 1977-05-16 | 1978-12-08 | Jeol Ltd | Scanning electronic microscope |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5678051A (en) * | 1979-11-30 | 1981-06-26 | Jeol Ltd | Electron beam device |
JP2016051534A (en) * | 2014-08-29 | 2016-04-11 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
Also Published As
Publication number | Publication date |
---|---|
JPS5820098B2 (en) | 1983-04-21 |
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