JPS545387A - Electron beam deflection scanner - Google Patents

Electron beam deflection scanner

Info

Publication number
JPS545387A
JPS545387A JP6984477A JP6984477A JPS545387A JP S545387 A JPS545387 A JP S545387A JP 6984477 A JP6984477 A JP 6984477A JP 6984477 A JP6984477 A JP 6984477A JP S545387 A JPS545387 A JP S545387A
Authority
JP
Japan
Prior art keywords
electron beam
beam deflection
deflection scanner
distance
scanner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6984477A
Other languages
Japanese (ja)
Other versions
JPS5820098B2 (en
Inventor
Susumu Ozasa
Katsuhiro Kuroda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP52069844A priority Critical patent/JPS5820098B2/en
Publication of JPS545387A publication Critical patent/JPS545387A/en
Publication of JPS5820098B2 publication Critical patent/JPS5820098B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To ensure a high-accuracy scanning over a wide area by securing f1< l1<f1+f2 with distance l1 for electronic lens having focal distance f1 and f2 and providing the deflection elemnt distant by l2≈f2 from the objective lens at the intermediate position.
COPYRIGHT: (C)1979,JPO&Japio
JP52069844A 1977-06-15 1977-06-15 Electron beam deflection scanning device Expired JPS5820098B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52069844A JPS5820098B2 (en) 1977-06-15 1977-06-15 Electron beam deflection scanning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52069844A JPS5820098B2 (en) 1977-06-15 1977-06-15 Electron beam deflection scanning device

Publications (2)

Publication Number Publication Date
JPS545387A true JPS545387A (en) 1979-01-16
JPS5820098B2 JPS5820098B2 (en) 1983-04-21

Family

ID=13414510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52069844A Expired JPS5820098B2 (en) 1977-06-15 1977-06-15 Electron beam deflection scanning device

Country Status (1)

Country Link
JP (1) JPS5820098B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5678051A (en) * 1979-11-30 1981-06-26 Jeol Ltd Electron beam device
JP2016051534A (en) * 2014-08-29 2016-04-11 株式会社日立ハイテクノロジーズ Charged particle beam device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53117387A (en) * 1977-03-23 1978-10-13 Western Electric Co Method of forming high resolution fine pattern at high speed
JPS53140963A (en) * 1977-05-16 1978-12-08 Jeol Ltd Scanning electronic microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53117387A (en) * 1977-03-23 1978-10-13 Western Electric Co Method of forming high resolution fine pattern at high speed
JPS53140963A (en) * 1977-05-16 1978-12-08 Jeol Ltd Scanning electronic microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5678051A (en) * 1979-11-30 1981-06-26 Jeol Ltd Electron beam device
JP2016051534A (en) * 2014-08-29 2016-04-11 株式会社日立ハイテクノロジーズ Charged particle beam device

Also Published As

Publication number Publication date
JPS5820098B2 (en) 1983-04-21

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