JPS53131755A - Scanning electronic microscope and such devices - Google Patents

Scanning electronic microscope and such devices

Info

Publication number
JPS53131755A
JPS53131755A JP4591677A JP4591677A JPS53131755A JP S53131755 A JPS53131755 A JP S53131755A JP 4591677 A JP4591677 A JP 4591677A JP 4591677 A JP4591677 A JP 4591677A JP S53131755 A JPS53131755 A JP S53131755A
Authority
JP
Japan
Prior art keywords
devices
electronic microscope
scanning electronic
deflection
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4591677A
Other languages
Japanese (ja)
Other versions
JPS5746625B2 (en
Inventor
Koji Saito
Naotake Saito
Yoshihisa Namikawa
Toshihiro Furuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4591677A priority Critical patent/JPS53131755A/en
Publication of JPS53131755A publication Critical patent/JPS53131755A/en
Publication of JPS5746625B2 publication Critical patent/JPS5746625B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To correct the spot deflection of the electron beam and thus to ensure a high-accuracy correction of the electron beam, by piling the DC current corresponding to the spot deflection caused by the astigmatism correction coil onto the scanning deflection coil or the image deflection coil.
COPYRIGHT: (C)1978,JPO&Japio
JP4591677A 1977-04-22 1977-04-22 Scanning electronic microscope and such devices Granted JPS53131755A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4591677A JPS53131755A (en) 1977-04-22 1977-04-22 Scanning electronic microscope and such devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4591677A JPS53131755A (en) 1977-04-22 1977-04-22 Scanning electronic microscope and such devices

Publications (2)

Publication Number Publication Date
JPS53131755A true JPS53131755A (en) 1978-11-16
JPS5746625B2 JPS5746625B2 (en) 1982-10-04

Family

ID=12732562

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4591677A Granted JPS53131755A (en) 1977-04-22 1977-04-22 Scanning electronic microscope and such devices

Country Status (1)

Country Link
JP (1) JPS53131755A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63181252A (en) * 1987-01-23 1988-07-26 Hitachi Ltd Charged particle beam device
KR101421094B1 (en) * 2013-12-03 2014-07-18 한국기계연구원 Coil of scanning electron microscope
WO2018163240A1 (en) * 2017-03-06 2018-09-13 株式会社日立ハイテクノロジーズ Charged particle beam device
JP2019204694A (en) * 2018-05-24 2019-11-28 株式会社ニューフレアテクノロジー Multiple electron beam image acquisition device and positioning method of multiple electron beam optical system
US11451043B1 (en) 2016-10-27 2022-09-20 State Farm Mutual Automobile Insurance Company Systems and methods for utilizing electricity monitoring devices to mitigate or prevent structural damage

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63181252A (en) * 1987-01-23 1988-07-26 Hitachi Ltd Charged particle beam device
KR101421094B1 (en) * 2013-12-03 2014-07-18 한국기계연구원 Coil of scanning electron microscope
US11451043B1 (en) 2016-10-27 2022-09-20 State Farm Mutual Automobile Insurance Company Systems and methods for utilizing electricity monitoring devices to mitigate or prevent structural damage
US11769996B2 (en) 2016-10-27 2023-09-26 State Farm Mutual Automobile Insurance Company Systems and methods for utilizing electricity monitoring devices to mitigate or prevent structural damage
US11861716B1 (en) 2016-10-27 2024-01-02 State Farm Mutual Automobile Insurance Company Systems and methods for utilizing electricity monitoring devices to reconstruct an electrical event
WO2018163240A1 (en) * 2017-03-06 2018-09-13 株式会社日立ハイテクノロジーズ Charged particle beam device
US10818470B2 (en) 2017-03-06 2020-10-27 Hitachi High-Tech Corporation Charged particle beam device
JP2019204694A (en) * 2018-05-24 2019-11-28 株式会社ニューフレアテクノロジー Multiple electron beam image acquisition device and positioning method of multiple electron beam optical system

Also Published As

Publication number Publication date
JPS5746625B2 (en) 1982-10-04

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