JPS53131755A - Scanning electronic microscope and such devices - Google Patents
Scanning electronic microscope and such devicesInfo
- Publication number
- JPS53131755A JPS53131755A JP4591677A JP4591677A JPS53131755A JP S53131755 A JPS53131755 A JP S53131755A JP 4591677 A JP4591677 A JP 4591677A JP 4591677 A JP4591677 A JP 4591677A JP S53131755 A JPS53131755 A JP S53131755A
- Authority
- JP
- Japan
- Prior art keywords
- devices
- electronic microscope
- scanning electronic
- deflection
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To correct the spot deflection of the electron beam and thus to ensure a high-accuracy correction of the electron beam, by piling the DC current corresponding to the spot deflection caused by the astigmatism correction coil onto the scanning deflection coil or the image deflection coil.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4591677A JPS53131755A (en) | 1977-04-22 | 1977-04-22 | Scanning electronic microscope and such devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4591677A JPS53131755A (en) | 1977-04-22 | 1977-04-22 | Scanning electronic microscope and such devices |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53131755A true JPS53131755A (en) | 1978-11-16 |
JPS5746625B2 JPS5746625B2 (en) | 1982-10-04 |
Family
ID=12732562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4591677A Granted JPS53131755A (en) | 1977-04-22 | 1977-04-22 | Scanning electronic microscope and such devices |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53131755A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63181252A (en) * | 1987-01-23 | 1988-07-26 | Hitachi Ltd | Charged particle beam device |
KR101421094B1 (en) * | 2013-12-03 | 2014-07-18 | 한국기계연구원 | Coil of scanning electron microscope |
WO2018163240A1 (en) * | 2017-03-06 | 2018-09-13 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
JP2019204694A (en) * | 2018-05-24 | 2019-11-28 | 株式会社ニューフレアテクノロジー | Multiple electron beam image acquisition device and positioning method of multiple electron beam optical system |
US11451043B1 (en) | 2016-10-27 | 2022-09-20 | State Farm Mutual Automobile Insurance Company | Systems and methods for utilizing electricity monitoring devices to mitigate or prevent structural damage |
-
1977
- 1977-04-22 JP JP4591677A patent/JPS53131755A/en active Granted
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63181252A (en) * | 1987-01-23 | 1988-07-26 | Hitachi Ltd | Charged particle beam device |
KR101421094B1 (en) * | 2013-12-03 | 2014-07-18 | 한국기계연구원 | Coil of scanning electron microscope |
US11451043B1 (en) | 2016-10-27 | 2022-09-20 | State Farm Mutual Automobile Insurance Company | Systems and methods for utilizing electricity monitoring devices to mitigate or prevent structural damage |
US11769996B2 (en) | 2016-10-27 | 2023-09-26 | State Farm Mutual Automobile Insurance Company | Systems and methods for utilizing electricity monitoring devices to mitigate or prevent structural damage |
US11861716B1 (en) | 2016-10-27 | 2024-01-02 | State Farm Mutual Automobile Insurance Company | Systems and methods for utilizing electricity monitoring devices to reconstruct an electrical event |
WO2018163240A1 (en) * | 2017-03-06 | 2018-09-13 | 株式会社日立ハイテクノロジーズ | Charged particle beam device |
US10818470B2 (en) | 2017-03-06 | 2020-10-27 | Hitachi High-Tech Corporation | Charged particle beam device |
JP2019204694A (en) * | 2018-05-24 | 2019-11-28 | 株式会社ニューフレアテクノロジー | Multiple electron beam image acquisition device and positioning method of multiple electron beam optical system |
Also Published As
Publication number | Publication date |
---|---|
JPS5746625B2 (en) | 1982-10-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS542623A (en) | Color picture tube of beam-index type | |
JPS53131755A (en) | Scanning electronic microscope and such devices | |
JPS5322357A (en) | Beam blanking unit | |
JPS52103966A (en) | Deflection unit for charged particle ray exposure device | |
JPS53105316A (en) | Pick up unit | |
JPS5291361A (en) | Scanning electron microscope | |
JPS53120277A (en) | Electron beam exposure device | |
GB2032739B (en) | Blanking circuit for the electron beam of a kinescope | |
JPS51120170A (en) | Scanning type elestson microscope | |
JPS5228220A (en) | Deflection yoke | |
JPS545387A (en) | Electron beam deflection scanner | |
JPS51136277A (en) | Lens for electron particle beam | |
JPS51142220A (en) | Picture receiving device | |
JPS52123825A (en) | Electron gun for pickup tube | |
JPS5251873A (en) | Electron beam exposure device | |
JPS5659444A (en) | Scanning electron microscope | |
JPS5340264A (en) | Electron beam deflecting equipment | |
JPS51135322A (en) | Electron beam adjusting magneto of braun tube | |
JPS5313384A (en) | X-ray tomogram image pickup unit | |
JPS52109878A (en) | Observing method of electron beam image | |
JPS5279662A (en) | Electron beam exposure device | |
JPS53144658A (en) | Cathode-ray tube | |
JPS52151518A (en) | Lead oxide photoconductive type photographing tube | |
JPS52122462A (en) | Electronic microscope | |
JPS5238819A (en) | Television came unit |