JPS5746625B2 - - Google Patents
Info
- Publication number
- JPS5746625B2 JPS5746625B2 JP4591677A JP4591677A JPS5746625B2 JP S5746625 B2 JPS5746625 B2 JP S5746625B2 JP 4591677 A JP4591677 A JP 4591677A JP 4591677 A JP4591677 A JP 4591677A JP S5746625 B2 JPS5746625 B2 JP S5746625B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4591677A JPS53131755A (en) | 1977-04-22 | 1977-04-22 | Scanning electronic microscope and such devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4591677A JPS53131755A (en) | 1977-04-22 | 1977-04-22 | Scanning electronic microscope and such devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53131755A JPS53131755A (en) | 1978-11-16 |
| JPS5746625B2 true JPS5746625B2 (en) | 1982-10-04 |
Family
ID=12732562
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4591677A Granted JPS53131755A (en) | 1977-04-22 | 1977-04-22 | Scanning electronic microscope and such devices |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53131755A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63181252A (en) * | 1987-01-23 | 1988-07-26 | Hitachi Ltd | Charged particle beam device |
| KR101421094B1 (en) * | 2013-12-03 | 2014-07-18 | 한국기계연구원 | Coil of scanning electron microscope |
| US11861716B1 (en) | 2016-10-27 | 2024-01-02 | State Farm Mutual Automobile Insurance Company | Systems and methods for utilizing electricity monitoring devices to reconstruct an electrical event |
| US10818470B2 (en) | 2017-03-06 | 2020-10-27 | Hitachi High-Tech Corporation | Charged particle beam device |
| JP7057220B2 (en) * | 2018-05-24 | 2022-04-19 | 株式会社ニューフレアテクノロジー | Positioning method for multi-electron beam image acquisition device and multi-electron beam optical system |
-
1977
- 1977-04-22 JP JP4591677A patent/JPS53131755A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53131755A (en) | 1978-11-16 |