JPS5275262A - Scanning electronic microscope - Google Patents
Scanning electronic microscopeInfo
- Publication number
- JPS5275262A JPS5275262A JP15207575A JP15207575A JPS5275262A JP S5275262 A JPS5275262 A JP S5275262A JP 15207575 A JP15207575 A JP 15207575A JP 15207575 A JP15207575 A JP 15207575A JP S5275262 A JPS5275262 A JP S5275262A
- Authority
- JP
- Japan
- Prior art keywords
- electronic microscope
- scanning electronic
- scanning
- test piece
- synchronizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To obtain the scanning video image with good quality, by synchronizing the scanning of the test piece radiating electron ray with the periodical change applied to the test piece.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15207575A JPS5275262A (en) | 1975-12-19 | 1975-12-19 | Scanning electronic microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15207575A JPS5275262A (en) | 1975-12-19 | 1975-12-19 | Scanning electronic microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5275262A true JPS5275262A (en) | 1977-06-24 |
JPS576664B2 JPS576664B2 (en) | 1982-02-05 |
Family
ID=15532496
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15207575A Granted JPS5275262A (en) | 1975-12-19 | 1975-12-19 | Scanning electronic microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5275262A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59111058A (en) * | 1982-12-08 | 1984-06-27 | ジヨ−ジ、マ−キン | Structural analysis method and device |
JPS59182371A (en) * | 1983-03-31 | 1984-10-17 | Res Dev Corp Of Japan | Polyphase simultaneous observation device |
-
1975
- 1975-12-19 JP JP15207575A patent/JPS5275262A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59111058A (en) * | 1982-12-08 | 1984-06-27 | ジヨ−ジ、マ−キン | Structural analysis method and device |
JPS59182371A (en) * | 1983-03-31 | 1984-10-17 | Res Dev Corp Of Japan | Polyphase simultaneous observation device |
JPH0423376B2 (en) * | 1983-03-31 | 1992-04-22 | Shingijutsu Kaihatsu Jigyodan |
Also Published As
Publication number | Publication date |
---|---|
JPS576664B2 (en) | 1982-02-05 |
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