JPS5275262A - Scanning electronic microscope - Google Patents

Scanning electronic microscope

Info

Publication number
JPS5275262A
JPS5275262A JP15207575A JP15207575A JPS5275262A JP S5275262 A JPS5275262 A JP S5275262A JP 15207575 A JP15207575 A JP 15207575A JP 15207575 A JP15207575 A JP 15207575A JP S5275262 A JPS5275262 A JP S5275262A
Authority
JP
Japan
Prior art keywords
electronic microscope
scanning electronic
scanning
test piece
synchronizing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15207575A
Other languages
Japanese (ja)
Other versions
JPS576664B2 (en
Inventor
Toshiyuki Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP15207575A priority Critical patent/JPS5275262A/en
Publication of JPS5275262A publication Critical patent/JPS5275262A/en
Publication of JPS576664B2 publication Critical patent/JPS576664B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To obtain the scanning video image with good quality, by synchronizing the scanning of the test piece radiating electron ray with the periodical change applied to the test piece.
COPYRIGHT: (C)1977,JPO&Japio
JP15207575A 1975-12-19 1975-12-19 Scanning electronic microscope Granted JPS5275262A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15207575A JPS5275262A (en) 1975-12-19 1975-12-19 Scanning electronic microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15207575A JPS5275262A (en) 1975-12-19 1975-12-19 Scanning electronic microscope

Publications (2)

Publication Number Publication Date
JPS5275262A true JPS5275262A (en) 1977-06-24
JPS576664B2 JPS576664B2 (en) 1982-02-05

Family

ID=15532496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15207575A Granted JPS5275262A (en) 1975-12-19 1975-12-19 Scanning electronic microscope

Country Status (1)

Country Link
JP (1) JPS5275262A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59111058A (en) * 1982-12-08 1984-06-27 ジヨ−ジ、マ−キン Structural analysis method and device
JPS59182371A (en) * 1983-03-31 1984-10-17 Res Dev Corp Of Japan Polyphase simultaneous observation device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59111058A (en) * 1982-12-08 1984-06-27 ジヨ−ジ、マ−キン Structural analysis method and device
JPS59182371A (en) * 1983-03-31 1984-10-17 Res Dev Corp Of Japan Polyphase simultaneous observation device
JPH0423376B2 (en) * 1983-03-31 1992-04-22 Shingijutsu Kaihatsu Jigyodan

Also Published As

Publication number Publication date
JPS576664B2 (en) 1982-02-05

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