JPH0423376B2 - - Google Patents

Description

[Detailed Description of the Invention] (A) Technical Field of the Invention The present invention relates to a scan line type dynamic observation device, in particular, a scanning line type dynamic observation device that samples image signals of a plurality of phases in each scanning line while performing high-speed scanning synchronized with a repetitive phenomenon. This invention relates to a device for displaying images on a display.

(B) Technical Background and Issues Generally, when an object to be observed changes over time, observing each of its changing states is important for physical property research, various property investigations, inspections, etc.

Conventionally, when an object to be observed changes at a relatively slow rate, high-speed scanning is performed, such as on commercial TV, and the state before and after the change can be easily obtained and observed as a still image. In addition, when the observation target changes rapidly, it is possible to obtain a still image of a specific phase using the sampling method, that is, by scanning a plane of a predetermined observation area and sampling only image signals of a specific phase of a high-speed repeating phenomenon. was completed.

However, in electrical equipment, commercial frequencies (50
Hz or 60Hz), and depending on the sampling method mentioned above, it is often used to detect repeated phenomena over a frequency range of several Hz to 1KHz, for example, when directly observing the magnetic domains of magnetic materials in transformers. The cycle was slow, and it took too long to obtain a still image with a specific phase. Also,
There is a problem in that it requires a longer time to simultaneously observe the changing states of a plurality of phases of an object to be observed.

(C) Object and Structure of the Invention The present invention aims to solve the above-mentioned problems, and includes sampling image signals of a plurality of phases in each scanning line while performing high-speed scanning in synchronization with the above-mentioned repetitive phenomenon. It is an object of the present invention to solve the above-mentioned problems by focusing on the fact that images of a plurality of specific phases can be displayed simultaneously by displaying them at positions on a display corresponding to image signals of each phase. Therefore, the scan line type dynamic observation device of the present invention uses a scan line to obtain an image of a specific phase by sequentially sampling signals of a specific phase in a fixed period from image signals acquired from an object to be observed that changes rapidly in a fixed period. In a line-type dynamic observation device, an image signal sampling means for sampling an image signal from an object to be observed with a fixed time width sufficiently shorter than the fixed period a plurality of times within the same period; synchronous scanning signal generating means for generating a scanning signal for scanning an object to be observed and a display in synchronization with each other during a sampling period of a time width;
fixed area scanning signal generating means for generating a signal for area scanning over a fixed area of the object to be observed by the synchronous scanning signal generating means in synchronization with the display; fixed area display control means for blanking the display outside the sampling period so that only image signals covering a certain area of the image signal are displayed on the display; scanning signal superimposing means for superimposing respective position signals corresponding to the positions to be displayed on the scanning signals output from the synchronous scanning signal generating means and the constant area scanning signal generating means to the display; It consists of a display display means for displaying an image signal, and the object to be observed and the display are scanned synchronously for each sampling period of sampling of a plurality of specific phases, and an image of a certain area of the object to be observed for each specific phase is displayed. It is characterized by displaying the images simultaneously and in parallel at different positions on the display.

According to the above configuration, image signals of a plurality of specific phases are sampled in the scanning line unit within the same repetition period of the object to be observed and are displayed simultaneously on the display, so that images of a plurality of phases, which is the object of the present invention, can be observed simultaneously. can.

(D) Embodiments of the Invention The present invention will be described in detail below with reference to the drawings. FIG. 1 shows an example of the concept of a scan line type dynamic observation device according to the present invention, and FIG. 2 shows the concept of a conventional dynamic observation device.

In FIGS. 1 and 2, 1 and 9 are repetitive drive signals supplied to the observation target, 2-1, 2-
2, 2-3, 2-4, ... blacking signal, 10
-1, 10-2,... are sampling pulses, 3-
1, 3-2, 3-3, 3-4, ..., 11 are horizontal scanning signals, 4 is vertical scanning signals, 5-1, 5-2, 5
-3,5-4,...6-1,6-2,6-3,6-
4, . . . are display display position switching signals, 7 is the order of horizontal scanning lines of the object to be observed, and 8 is the multiphase display position of the display (CRT).

Conventionally, as shown in FIG. 2, specific same phases 9-1, 9-2, 9-3, 9-4, .
Sampling pulse 10-
1, 10-2, 10-3, 10-4, etc., and extract an image signal from the object to be observed using these sampling pulses. Bright spots were displayed sequentially on the scanning line as shown in the CRT 12 in FIG. Similarly, by sequentially displaying bright spots on the second, third, etc. horizontal scanning lines, a still image of a specific phase is obtained. Therefore, the period of the horizontal scanning signal 11 needs to be extremely long compared to the period of the repetitive control signal 9 supplied to the object to be observed. Otherwise, it will not be possible to obtain sufficient bright spots of image signals within one horizontal scanning line.

On the other hand, in the present invention, as shown in FIG. 1, the period of the horizontal scanning signals 3-1, 3-2, 3-3, 3-4,... It is different from the conventional concept in that it is extremely short compared to the conventional concept, and it is also different from the conventional concept in that it is possible to sample a plurality of image signals of specific phases within one cycle of the drive signal 1 and display them simultaneously on the display. Different from other things. less than,
The operation of the present invention will be explained.

In FIG. 1, sampling signals 2-1, 2-2, 2 each having a certain time width at a plurality of specific phases of a repetitive drive signal 1 supplied to an object to be observed are shown.
-3 and 2-4, image signals from the object to be observed are sampled, respectively. These sampling signals 2-1, 2-2, 2-3, 2
The observation area of the object to be observed is sequentially and repeatedly scanned horizontally at a high speed in one fixed time width of -4 as shown in FIG. 1B. On the other hand, horizontal scanning of the display (CRT) 8 is performed by horizontal scanning signals 3-1, 3-2, 3-3, 3-
4,..., a horizontal position signal 5 corresponding to each phase
By superimposing a rectangular wave signal of a fixed level of -2, 5-4 or 5-1, 5-3, either the position or in FIG. 1C is selected and scanned in the horizontal direction. The object to be observed 7 is scanned in the vertical direction by the vertical scanning signal 4 . The vertical scan of the display is
Vertical position signals 6-2, 6-4 or 6-1 corresponding to each phase are added to the vertical scanning signal 4,
By superimposing a rectangular wave signal of a certain level in 6-3, either the position or in FIG. 1C is selected and scanned in the vertical direction. By displaying each of the sampled image signals on a display, images of different phases can be simultaneously obtained at positions , , and on the display, as shown in FIG. 1C.

FIG. 3 shows the configuration of one embodiment of the scan line type dynamic observation device according to the present invention.

In Figure 3, EOS30 represents the electron optical system of a scanning electron microscope (hereinafter referred to as SEM), which reduces the electrons (about 30KV) emitted from the electron gun using a magnetic field type lens. Electron beam spot to be observed (SAMPLE) 31
It plays the role of forming an image. EOS30 is
kept in vacuum. 15, 15' and 18,
18' are a horizontal scanning coil and a vertical scanning coil, respectively. The operation will be explained below.

The clock from master OSC13 is divided into frequency divider circuit 3
4, the frequency is divided by 1/2 ^N (N is the number of frequency division stages), and its output is supplied to the drive signal generator 35. As shown in FIG. 1, the drive signal generator 35 generates a sine wave synchronized with the master OSC 13, and supplies the sine wave magnetic flux to the SAMPLE 31, which is the object to be observed, via the exciting coil 37. Note that a triangular wave and a rectangular wave may also be used as necessary.

SAMPLE 31 is irradiated with a minute electron beam spot by EOS 30. The SAMPLE 31 irradiated by the electron beam spot emits various signals such as secondary electrons, reflected electrons, and X-rays. Here, backscattered electrons, which are particularly effective for observing magnetic domains of magnetic materials, are detected by a silicon detector SiD32, amplified by a preamplifier 28, and the output signal is sent to a brightness modulation terminal 2 of a display CRT39.
4. Although brightness modulation is used in the above example, it is also possible to superimpose it on the vertical scanning signal and perform amplitude modulation, if necessary.

The clock from master OSC13 is input to horizontal scanning signal generator H14. Also, master
The clock from the OSC 13 is frequency-divided by the frequency divider circuit 16 and input to the vertical scanning signal generator V17. Their output currents, such as the horizontal synchronous scanning signal of FIG. 1C and the vertical synchronous scanning signal of FIG.
9 or 28, respectively EOS30 and
It is supplied to the horizontal scanning coils H15, 15' or the vertical scanning coils V18, 18' of the CRT 39 to horizontally scan and vertically scan the electron beam spot, respectively.

The clock from the master OSC 13 is input to a counter 19 to generate a blacking signal, which is reset each time by a drive start signal 36 from a drive signal generator 35 and then starts counting. The counted value is PROM2
0, and outputs various blacking signals according to the written data, such as the blacking signal shown in FIG. 1B. The blacking signal of the phase specified by the phase switch 21 is input to the blacking control section 22, and its output is supplied to the terminal 23 of the CRT 39, so that the brightness of the CRT 39 is blacked. Further, the value counted by the counter 19 is input to the address of the PROM 25.

In order to give the CRT39 a bias (shift) to display images of a plurality of specific phases at respective positions, values such as those shown in Figure 1 E and F are written in the PROM, and the data in the PROM25 is The multiphase display changeover switch 26 selects and outputs the digital outputs shown in FIG. 1, E and F, for example. The output data of the horizontal scanning superimposed signal and the vertical scanning superimposed signal are respectively
Input to DA converters 27-1, 27-2,
They are converted into analog quantities and sent to the horizontal scanning amplifier 2.
9 or vertical scanning amplifier 28, and is superimposed on each scanning signal.

With the above configuration, the frequency of the master OSC 13 is now set to . SAMPLE31 which is the object to be observed
are synchronously magnetized at a frequency of /2 ^N. EOS
The horizontal scanning of is performed at high speed in synchronization with
The horizontal scanning of the CRT is synchronized with , and is sequentially scanned at a high speed to predetermined positions on the display selected by the multiphase display switch 26. The EOS vertical scan is /
SAMPLE is sequentially scanned in synchronization with ^2M , and vertical scanning of the CRT is sequentially scanned in synchronization with / ^2M to a predetermined position on the display selected by the multiphase display switch 26. As a result, images of a plurality of specific phases selected by the phase switch 21 are displayed simultaneously on the display 39.

An example of a display displaying four phases simultaneously is shown in Fig. 1C, and A, B, C,
D, E, and F show each signal waveform. Similarly PROM
If a value such as 8-phase simultaneous display is written in the contents of 20 and 25, simultaneous multi-phase display will be performed. In addition, the present invention relates to a device for obtaining multiple images of a specific phase compared to a repeating phenomenon.
Not limited to SEM, particle beam, photon beam,
The present invention can also be applied to scanning devices and TV photographing devices that utilize ultrasonic beams or the like.

(E) Effects of the Invention As explained above, according to the present invention, while performing high-speed scanning in synchronization with a repetitive phenomenon, multiple image signals of arbitrary phases are sampled in units of scanning lines, and each is displayed on a display, and a specific This has the effect of allowing multiple phase images to be observed simultaneously. In particular, it is possible to easily obtain images of any phase in a dynamic state from several Hz to 1 KHz, which was previously difficult, and to obtain images of other phases within the same time as obtaining an image of one specific phase. This has the great effect of making it possible to observe multiple phases at the same time.

[Brief explanation of drawings]

FIG. 1 is a conceptual diagram of a scan line type multiphase simultaneous observation device according to the present invention, FIG. 2 is a conceptual diagram of a conventional sampling method, and FIG. 3 is a configuration diagram of an embodiment of the present invention. In the figure, 1 and 9 are drive signals, 2-1, 2-
2, ... is the CRT blacking signal, 3-1,
3-2, ... is the horizontal synchronization signal of CRT and EOS,
4 is the vertical synchronous scanning signal of CRT and EOS, 5-1,
5-2, 5-3, 5-4, ... are horizontal movement signals of the CRT screen, 6-1, 6-2, 6-3, 6-
4, ... is the vertical movement signal of the CRT screen, 10
-1, 10-2... are conventional sampling signals,
11 is a conventional horizontal scanning signal, 15 and 15' are respectively
EOS or CRT horizontal scanning coil, 18,1
8' are EOS or CRT vertical scanning coils, respectively.
21 is a blacking signal phase switching SW, 26 is a multi-phase display switching SW, 30 is an electron optical system (EOS),
32 is silicon detector SiD, 31 is
SAMPLE, 37...This is an excitation coil.

Claims (1)

[Claims] 1. In a scan line type dynamic observation device that obtains an image of a specific phase by sequentially sampling signals of a specific phase in a fixed period from image signals acquired from an object to be observed that changes rapidly in a fixed period. , an image signal sampling means for sampling an image signal from an object to be observed with a fixed time width sufficiently shorter than the fixed period a plurality of times within the same period; Synchronous scanning signal generating means for generating scanning signals for scanning an object to be observed and a display in synchronization with each other, and a signal for performing area scanning over a certain area of the object to be observed by the synchronous scanning signal generating means in synchronization with the display. a fixed area scanning signal generating means for generating a fixed area scanning signal, and a fixed area blanking the display outside the sampling period so that only image signals covering a fixed area of the object to be observed are displayed on the display in synchronization with the synchronous scanning signal generating means. Display control means 2
0 to 22, and the plurality of specific phase image signals obtained by the image signal sampling means are connected to the synchronous scanning signal generating means and the constant area scanning signal generating means to generate respective position signals corresponding to the positions at which the image signals of a plurality of specific phases are displayed on the display. It consists of scanning signal superimposing means 25 to 29 for superimposing the scanning signal on the scanning signal outputted from the means to the display, and a display display means for displaying the plurality of sampled image signals, and for each sampling period of sampling of the plurality of specific phases. Scan line type dynamic observation characterized by scanning the object to be observed and the display in synchronization, and displaying images of a fixed area of the object for each specific phase simultaneously and in parallel at different positions on the display. Device.