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JPS5951540A - Voltage contrast image display apparatus - Google Patents

Voltage contrast image display apparatus

Info

Publication number
JPS5951540A
JPS5951540A JP13753483A JP13753483A JPS5951540A JP S5951540 A JPS5951540 A JP S5951540A JP 13753483 A JP13753483 A JP 13753483A JP 13753483 A JP13753483 A JP 13753483A JP S5951540 A JPS5951540 A JP S5951540A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
signal
voltage
circuit
sample
contrast
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13753483A
Inventor
Satoru Fukuhara
Yoshio Hokotani
Hideo Todokoro
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Abstract

PURPOSE:To obtain an apparatus for displaying a voltage contrast image under the condition that a protection film is covered through the use of a low speed energy as the primary beam by respectively providing specific deflection oscillator, a circuit for applying voltage to sample and a signal selection circuit. CONSTITUTION:A voltage is applied to the specified Al wiring of semiconductor of a sample 8. When the sample is irradiated with slowly accelerated primary beams 1, the secondary electrons are generated from the surface of sample 8. The secondary electron signal generated also includes an general SEM data and a voltage contrast data applied to the Al wiring. This signal is detected by a detector 5 and amplified and is then inputted to a signal selection circuit 6. When a rectangular wave is applied to the Al wiring, a signal having equal positive and negative values is generated as an output. The signal selection circuit 6 selects either one signal and performs switching by the synchronous signal of X-scanning sent from the deflection oscillator 4. An output is inputted as an intensity modulated signal of CRT 9 and is displayed on the CRT screen as an SEM image.
JP13753483A 1983-07-29 1983-07-29 Voltage contrast image display apparatus Pending JPS5951540A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13753483A JPS5951540A (en) 1983-07-29 1983-07-29 Voltage contrast image display apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13753483A JPS5951540A (en) 1983-07-29 1983-07-29 Voltage contrast image display apparatus

Publications (1)

Publication Number Publication Date
JPS5951540A true true JPS5951540A (en) 1984-03-26

Family

ID=15200927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13753483A Pending JPS5951540A (en) 1983-07-29 1983-07-29 Voltage contrast image display apparatus

Country Status (1)

Country Link
JP (1) JPS5951540A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59210480A (en) * 1983-05-14 1984-11-29 Toshiba Electric Equip Large color display unit
EP0495262A2 (en) * 1991-01-14 1992-07-22 Schlumberger Technologies, Inc. Integrated circuits modification with focused ion beam system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120256A (en) * 1974-08-13 1976-02-18 Yotsukaichi Gosei Kk Horiechirenokisaidojushi soseibutsu

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5120256A (en) * 1974-08-13 1976-02-18 Yotsukaichi Gosei Kk Horiechirenokisaidojushi soseibutsu

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59210480A (en) * 1983-05-14 1984-11-29 Toshiba Electric Equip Large color display unit
EP0495262A2 (en) * 1991-01-14 1992-07-22 Schlumberger Technologies, Inc. Integrated circuits modification with focused ion beam system

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