JPS55126954A - Scanning electron microscope - Google Patents
Scanning electron microscopeInfo
- Publication number
- JPS55126954A JPS55126954A JP3391079A JP3391079A JPS55126954A JP S55126954 A JPS55126954 A JP S55126954A JP 3391079 A JP3391079 A JP 3391079A JP 3391079 A JP3391079 A JP 3391079A JP S55126954 A JPS55126954 A JP S55126954A
- Authority
- JP
- Japan
- Prior art keywords
- acceleration voltage
- circuit
- control circuit
- image
- acceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To enable simultaneous observation by displaying the sample images in different two or more acceleration voltages on one or two display units.
CONSTITUTION: The timing signal generated from the timing circuit 21 is separately sent to the acceleration voltage control circuit 19, magnification adjustment circuit 7, lens control circuit 16, image amplifier 10 and switching circuit 11. At the first period of the timing signal, high acceleration voltage is applied to the electron gun 2 from the acceleration voltage control circuit 19 and low acceleration voltage is applied to it in the second period. The image signal obtained from the detector 9 by the scanning of an electron beam is added to the cathode ray tubes 12 and 13 through the image amplifier 10 and the switching circuit 11 and the sample image based on the different acceleration voltages are separately displayed on the cathode ray tubes 12 and 13.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3391079A JPS55126954A (en) | 1979-03-23 | 1979-03-23 | Scanning electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3391079A JPS55126954A (en) | 1979-03-23 | 1979-03-23 | Scanning electron microscope |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55126954A true JPS55126954A (en) | 1980-10-01 |
JPS6155735B2 JPS6155735B2 (en) | 1986-11-28 |
Family
ID=12399663
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3391079A Granted JPS55126954A (en) | 1979-03-23 | 1979-03-23 | Scanning electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55126954A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5914262U (en) * | 1982-07-20 | 1984-01-28 | 日本電子株式会社 | Automatic photographing device in electron microscope |
EP1353356A2 (en) * | 2002-04-11 | 2003-10-15 | Keyence Corporation | Electron microscope charge-up prevention method and electron microscope |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0454506Y2 (en) * | 1987-09-30 | 1992-12-21 | ||
JPH0454505Y2 (en) * | 1987-09-30 | 1992-12-21 | ||
JPH0454507Y2 (en) * | 1987-10-15 | 1992-12-21 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5427354A (en) * | 1977-08-01 | 1979-03-01 | Hitachi Ltd | Scan-type electronic microscope |
-
1979
- 1979-03-23 JP JP3391079A patent/JPS55126954A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5427354A (en) * | 1977-08-01 | 1979-03-01 | Hitachi Ltd | Scan-type electronic microscope |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5914262U (en) * | 1982-07-20 | 1984-01-28 | 日本電子株式会社 | Automatic photographing device in electron microscope |
EP1353356A2 (en) * | 2002-04-11 | 2003-10-15 | Keyence Corporation | Electron microscope charge-up prevention method and electron microscope |
EP1353356A3 (en) * | 2002-04-11 | 2005-07-20 | Keyence Corporation | Electron microscope charge-up prevention method and electron microscope |
Also Published As
Publication number | Publication date |
---|---|
JPS6155735B2 (en) | 1986-11-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4091374A (en) | Method for pictorially displaying output information generated by an object imaging apparatus | |
JPS55126954A (en) | Scanning electron microscope | |
US3541233A (en) | Color conversion system for x-rays | |
US3986027A (en) | Stereo scanning microprobe | |
JPS6166352A (en) | Scanning electronic microscope | |
JPS5478075A (en) | Sample image display device | |
JPS5427354A (en) | Scan-type electronic microscope | |
JPS54101257A (en) | Image dispaly unit | |
JPS63116348A (en) | View matching device of electron beam device | |
DeWitt Jr | A report on the image orthicon using slow read-out | |
JPS55166854A (en) | Scanning electron microscope and magnification display unit in its simulator | |
SU651428A1 (en) | Electron beam switching device | |
JPS5516337A (en) | Scanning type electron microscope | |
JPH0221549A (en) | Scanning electron microscope | |
JPS57199164A (en) | Sample image observation unit | |
JPS55151757A (en) | Image display for scanning type transmission electron microscope | |
KR870000837B1 (en) | Crt display fluorescent screen protecting circuit | |
JPS55126953A (en) | Scanning electron microscope | |
SE8300916L (en) | PICTURES AND A PRESENTATION PLAYER FOR FERGER PICTURES WITH MULTIPLE FERGER | |
JPS59224038A (en) | Charged particle beam scanning type analyzer | |
JPS5327359A (en) | Electronic microscope prov ided with electron beam deflector | |
JPS54148372A (en) | Electron microscope | |
JPH0696711A (en) | Display method for image of scanning electron microscope | |
SU920894A1 (en) | Scanning device for reproducing specimen image | |
JPS5640763A (en) | Oscilloscope having waveform memory function |