JPS55126954A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS55126954A
JPS55126954A JP3391079A JP3391079A JPS55126954A JP S55126954 A JPS55126954 A JP S55126954A JP 3391079 A JP3391079 A JP 3391079A JP 3391079 A JP3391079 A JP 3391079A JP S55126954 A JPS55126954 A JP S55126954A
Authority
JP
Japan
Prior art keywords
acceleration voltage
circuit
control circuit
image
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3391079A
Other languages
Japanese (ja)
Other versions
JPS6155735B2 (en
Inventor
Setsuo Norioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP3391079A priority Critical patent/JPS55126954A/en
Publication of JPS55126954A publication Critical patent/JPS55126954A/en
Publication of JPS6155735B2 publication Critical patent/JPS6155735B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To enable simultaneous observation by displaying the sample images in different two or more acceleration voltages on one or two display units.
CONSTITUTION: The timing signal generated from the timing circuit 21 is separately sent to the acceleration voltage control circuit 19, magnification adjustment circuit 7, lens control circuit 16, image amplifier 10 and switching circuit 11. At the first period of the timing signal, high acceleration voltage is applied to the electron gun 2 from the acceleration voltage control circuit 19 and low acceleration voltage is applied to it in the second period. The image signal obtained from the detector 9 by the scanning of an electron beam is added to the cathode ray tubes 12 and 13 through the image amplifier 10 and the switching circuit 11 and the sample image based on the different acceleration voltages are separately displayed on the cathode ray tubes 12 and 13.
COPYRIGHT: (C)1980,JPO&Japio
JP3391079A 1979-03-23 1979-03-23 Scanning electron microscope Granted JPS55126954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3391079A JPS55126954A (en) 1979-03-23 1979-03-23 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3391079A JPS55126954A (en) 1979-03-23 1979-03-23 Scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS55126954A true JPS55126954A (en) 1980-10-01
JPS6155735B2 JPS6155735B2 (en) 1986-11-28

Family

ID=12399663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3391079A Granted JPS55126954A (en) 1979-03-23 1979-03-23 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS55126954A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5914262U (en) * 1982-07-20 1984-01-28 日本電子株式会社 Automatic photographing device in electron microscope
EP1353356A2 (en) * 2002-04-11 2003-10-15 Keyence Corporation Electron microscope charge-up prevention method and electron microscope

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0454506Y2 (en) * 1987-09-30 1992-12-21
JPH0454505Y2 (en) * 1987-09-30 1992-12-21
JPH0454507Y2 (en) * 1987-10-15 1992-12-21

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5427354A (en) * 1977-08-01 1979-03-01 Hitachi Ltd Scan-type electronic microscope

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5427354A (en) * 1977-08-01 1979-03-01 Hitachi Ltd Scan-type electronic microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5914262U (en) * 1982-07-20 1984-01-28 日本電子株式会社 Automatic photographing device in electron microscope
EP1353356A2 (en) * 2002-04-11 2003-10-15 Keyence Corporation Electron microscope charge-up prevention method and electron microscope
EP1353356A3 (en) * 2002-04-11 2005-07-20 Keyence Corporation Electron microscope charge-up prevention method and electron microscope

Also Published As

Publication number Publication date
JPS6155735B2 (en) 1986-11-28

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