JPS5427354A - Scan-type electronic microscope - Google Patents

Scan-type electronic microscope

Info

Publication number
JPS5427354A
JPS5427354A JP9136677A JP9136677A JPS5427354A JP S5427354 A JPS5427354 A JP S5427354A JP 9136677 A JP9136677 A JP 9136677A JP 9136677 A JP9136677 A JP 9136677A JP S5427354 A JPS5427354 A JP S5427354A
Authority
JP
Japan
Prior art keywords
scan
type electronic
electronic microscope
beam scanning
low
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9136677A
Other languages
Japanese (ja)
Other versions
JPS5842938B2 (en
Inventor
Hideo Todokoro
Yoshio Hokotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP52091366A priority Critical patent/JPS5842938B2/en
Publication of JPS5427354A publication Critical patent/JPS5427354A/en
Publication of JPS5842938B2 publication Critical patent/JPS5842938B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a good- quality picture with a high operational performance by giving the high and low time devision to the electron beam scanning for the scan-type electronic microscope and also dividing the information signal sent from the test sample synchronized with the time division of the beam scanning to have a display of the high and low-speed scan images.
COPYRIGHT: (C)1979,JPO&Japio
JP52091366A 1977-08-01 1977-08-01 scanning electron microscope Expired JPS5842938B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52091366A JPS5842938B2 (en) 1977-08-01 1977-08-01 scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52091366A JPS5842938B2 (en) 1977-08-01 1977-08-01 scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS5427354A true JPS5427354A (en) 1979-03-01
JPS5842938B2 JPS5842938B2 (en) 1983-09-22

Family

ID=14024372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52091366A Expired JPS5842938B2 (en) 1977-08-01 1977-08-01 scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS5842938B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55126954A (en) * 1979-03-23 1980-10-01 Jeol Ltd Scanning electron microscope
JPS5765658A (en) * 1980-10-08 1982-04-21 Jeol Ltd Electron beam device
JPS57168459A (en) * 1981-04-10 1982-10-16 Hitachi Ltd Scanning electron microscope and similar device

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63162531U (en) * 1987-04-11 1988-10-24
JPS63162530U (en) * 1987-04-11 1988-10-24

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55126954A (en) * 1979-03-23 1980-10-01 Jeol Ltd Scanning electron microscope
JPS6155735B2 (en) * 1979-03-23 1986-11-28 Nippon Electron Optics Lab
JPS5765658A (en) * 1980-10-08 1982-04-21 Jeol Ltd Electron beam device
JPS57168459A (en) * 1981-04-10 1982-10-16 Hitachi Ltd Scanning electron microscope and similar device

Also Published As

Publication number Publication date
JPS5842938B2 (en) 1983-09-22

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