JPS53114664A - Electronic microscope of scanning type - Google Patents

Electronic microscope of scanning type

Info

Publication number
JPS53114664A
JPS53114664A JP2901177A JP2901177A JPS53114664A JP S53114664 A JPS53114664 A JP S53114664A JP 2901177 A JP2901177 A JP 2901177A JP 2901177 A JP2901177 A JP 2901177A JP S53114664 A JPS53114664 A JP S53114664A
Authority
JP
Japan
Prior art keywords
scanning type
electronic microscope
images
changing
test piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2901177A
Other languages
Japanese (ja)
Other versions
JPS5816591B2 (en
Inventor
Takao Namae
Kanjiro Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP52029011A priority Critical patent/JPS5816591B2/en
Publication of JPS53114664A publication Critical patent/JPS53114664A/en
Publication of JPS5816591B2 publication Critical patent/JPS5816591B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To simultaneously display the images of high and low magnification on the Braun tube screen, by changing the scanning area of electron rays emitting the test piece.
COPYRIGHT: (C)1978,JPO&Japio
JP52029011A 1977-03-16 1977-03-16 scanning electron microscope Expired JPS5816591B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52029011A JPS5816591B2 (en) 1977-03-16 1977-03-16 scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52029011A JPS5816591B2 (en) 1977-03-16 1977-03-16 scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS53114664A true JPS53114664A (en) 1978-10-06
JPS5816591B2 JPS5816591B2 (en) 1983-03-31

Family

ID=12264455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52029011A Expired JPS5816591B2 (en) 1977-03-16 1977-03-16 scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS5816591B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS505085A (en) * 1973-04-27 1975-01-20

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS505085A (en) * 1973-04-27 1975-01-20

Also Published As

Publication number Publication date
JPS5816591B2 (en) 1983-03-31

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