JPS57168459A - Scanning electron microscope and similar device - Google Patents

Scanning electron microscope and similar device

Info

Publication number
JPS57168459A
JPS57168459A JP5299781A JP5299781A JPS57168459A JP S57168459 A JPS57168459 A JP S57168459A JP 5299781 A JP5299781 A JP 5299781A JP 5299781 A JP5299781 A JP 5299781A JP S57168459 A JPS57168459 A JP S57168459A
Authority
JP
Japan
Prior art keywords
scanning speed
given
control
settling
brightness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5299781A
Other languages
Japanese (ja)
Inventor
Osamu Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5299781A priority Critical patent/JPS57168459A/en
Publication of JPS57168459A publication Critical patent/JPS57168459A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To shorten the time of picture control by making the scanning speed of a charged particle beam during the automatic adjustment of the brightness and contrast of a sample image higher than that during image observation. CONSTITUTION:After a horizontal and a vertical scanning signal generator 16 and 17 are switched to a given scanning speed, sample-image signals entering into a cathode-ray tube 22 are given to an integrator 4 and a peak retaining circuit 7 so as to integrate the signals of one vertical scanning and to retain the maximum value. Next, switches 5 and 9 are closed for a given time so as to control the bias voltage of an amplifier 2 by means of a negative-feedback loop including integrators 4 and 6, and to control the gain of a photoelectron amplifier tube 1 by means of a negative-feedback loop including the peak retaining circuit 7. Then, at the end of the settling, after carrying out the above procedure repeatedly, display is performed on a display circuit 19, and the scanning speed is returned to the original speed. As a result, the settling of brightness and contrast can be finished in several seconds by increasing the scanning speed during the adjustment, and the manipulation performance can be improved.
JP5299781A 1981-04-10 1981-04-10 Scanning electron microscope and similar device Pending JPS57168459A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5299781A JPS57168459A (en) 1981-04-10 1981-04-10 Scanning electron microscope and similar device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5299781A JPS57168459A (en) 1981-04-10 1981-04-10 Scanning electron microscope and similar device

Publications (1)

Publication Number Publication Date
JPS57168459A true JPS57168459A (en) 1982-10-16

Family

ID=12930560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5299781A Pending JPS57168459A (en) 1981-04-10 1981-04-10 Scanning electron microscope and similar device

Country Status (1)

Country Link
JP (1) JPS57168459A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004006219A (en) * 2002-04-11 2004-01-08 Keyence Corp Electron microscope, operating method of electron microscope, operation program of electron microscope and recording medium capable of reading by computer

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53126256A (en) * 1977-04-11 1978-11-04 Hitachi Ltd Automatic brightness controller of scan-type electron microscope
JPS5427354A (en) * 1977-08-01 1979-03-01 Hitachi Ltd Scan-type electronic microscope
JPS5443458A (en) * 1977-09-12 1979-04-06 Jeol Ltd Automatic focusing device of electronic scan microscope

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53126256A (en) * 1977-04-11 1978-11-04 Hitachi Ltd Automatic brightness controller of scan-type electron microscope
JPS5427354A (en) * 1977-08-01 1979-03-01 Hitachi Ltd Scan-type electronic microscope
JPS5443458A (en) * 1977-09-12 1979-04-06 Jeol Ltd Automatic focusing device of electronic scan microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004006219A (en) * 2002-04-11 2004-01-08 Keyence Corp Electron microscope, operating method of electron microscope, operation program of electron microscope and recording medium capable of reading by computer

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