JPS5568059A - Automatic position setter for reflective electron beam detector in scanning electronic microscope - Google Patents
Automatic position setter for reflective electron beam detector in scanning electronic microscopeInfo
- Publication number
- JPS5568059A JPS5568059A JP14174278A JP14174278A JPS5568059A JP S5568059 A JPS5568059 A JP S5568059A JP 14174278 A JP14174278 A JP 14174278A JP 14174278 A JP14174278 A JP 14174278A JP S5568059 A JPS5568059 A JP S5568059A
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- detector
- specimen
- beam detector
- electronic microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To optimize the picture quality of the image of specimen, by controlling the movement of detecting means such that integrated value of signal from detecting means is maximized.
CONSTITUTION: Electron beam EB from electron gun 3 is focused by focusing lenzs 4, 5 and irradiated on the specimen 6. The detector 9 detects the reflected electron beam E produced from the specimen 6. Said output is supplied through amplifier 10 to the integrator 14 and integrated. The integrated value is supplied through A/D converter 15 to the shift register 16 to be stored temporarily. The detector moving mechanism 13 is controlled on the basis of max. value in the shift register 16 to set the detector 9 at the peak position of average strength distribution of reflected electron beam.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14174278A JPS5568059A (en) | 1978-11-17 | 1978-11-17 | Automatic position setter for reflective electron beam detector in scanning electronic microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14174278A JPS5568059A (en) | 1978-11-17 | 1978-11-17 | Automatic position setter for reflective electron beam detector in scanning electronic microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5568059A true JPS5568059A (en) | 1980-05-22 |
Family
ID=15299138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14174278A Pending JPS5568059A (en) | 1978-11-17 | 1978-11-17 | Automatic position setter for reflective electron beam detector in scanning electronic microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5568059A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS613662U (en) * | 1984-06-12 | 1986-01-10 | 日本電子株式会社 | Secondary electron detection device |
| WO2012026291A1 (en) * | 2010-08-24 | 2012-03-01 | 株式会社 日立ハイテクノロジーズ | Charged particle beam device and sample observation method |
| JP2016024900A (en) * | 2014-07-17 | 2016-02-08 | 日本電子株式会社 | Radiation analyzer |
-
1978
- 1978-11-17 JP JP14174278A patent/JPS5568059A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS613662U (en) * | 1984-06-12 | 1986-01-10 | 日本電子株式会社 | Secondary electron detection device |
| JPH0535558Y2 (en) * | 1984-06-12 | 1993-09-09 | ||
| WO2012026291A1 (en) * | 2010-08-24 | 2012-03-01 | 株式会社 日立ハイテクノロジーズ | Charged particle beam device and sample observation method |
| JP2012048819A (en) * | 2010-08-24 | 2012-03-08 | Hitachi High-Technologies Corp | Charged particle beam device and sample observation method |
| EP2610891A1 (en) * | 2010-08-24 | 2013-07-03 | Hitachi High-Technologies Corporation | Charged particle beam device and sample observation method |
| US8791413B2 (en) | 2010-08-24 | 2014-07-29 | Hitachi High-Technologies Corporation | Charged particle beam device and sample observation method using a rotating detector |
| EP2610891A4 (en) * | 2010-08-24 | 2015-01-14 | Hitachi High Tech Corp | Charged particle beam device and sample observation method |
| JP2016024900A (en) * | 2014-07-17 | 2016-02-08 | 日本電子株式会社 | Radiation analyzer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS5457949A (en) | Automatic focusing unit for scanning electron microscope and so on | |
| JPS5731134A (en) | Drawing device by electron beam | |
| JPS5568059A (en) | Automatic position setter for reflective electron beam detector in scanning electronic microscope | |
| JPS5727551A (en) | Electron microscope | |
| JPS5350851A (en) | Automatic focus control apparatus of microscope | |
| JPS5760205A (en) | Exposure be electron beam | |
| JPS5469075A (en) | Electron beam drawing device | |
| JPS54138467A (en) | Scanning type electron microscope or resembling apparatus | |
| JPS5543714A (en) | Electron beam irradiating method and device for electronic microscope | |
| JPS5563822A (en) | Electron beam device | |
| JPS5575222A (en) | Electro-optical mirror tube | |
| JPS5454581A (en) | Electron beam exposure apparatus | |
| JPS54100661A (en) | Focusing unit of electron-beam device | |
| JPS5497358A (en) | Scanning electron microscope | |
| JPS5760650A (en) | Strobe electron microscope | |
| JPS55113242A (en) | Electron gun for picture tube | |
| JPS5638058A (en) | Image comtrolling method | |
| JPS5624748A (en) | Focal point detector for scanning type electron microscope | |
| JPS5671589A (en) | Charged particle beam processing device | |
| JPS6476655A (en) | Radiation quantity stabilizing device for electron microscope | |
| JPS54156683A (en) | Beam intensity distribution measuring apparatus in electron beam apparatus | |
| JPS5719948A (en) | Electron beam device | |
| JPS53128975A (en) | Automatic focus control device for scanning type electron beam device and others | |
| JPS56116259A (en) | Transmissive electron microscope | |
| JPS5586053A (en) | Image pickup tube |