JPS5760650A - Strobe electron microscope - Google Patents

Strobe electron microscope

Info

Publication number
JPS5760650A
JPS5760650A JP13388680A JP13388680A JPS5760650A JP S5760650 A JPS5760650 A JP S5760650A JP 13388680 A JP13388680 A JP 13388680A JP 13388680 A JP13388680 A JP 13388680A JP S5760650 A JPS5760650 A JP S5760650A
Authority
JP
Japan
Prior art keywords
specimen
pulse
voltage
electron
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13388680A
Other languages
Japanese (ja)
Inventor
Nobuaki Tamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP13388680A priority Critical patent/JPS5760650A/en
Publication of JPS5760650A publication Critical patent/JPS5760650A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic- or electric fields in the object; Lorentzmicroscopy with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To view the change between the specific phases of the applied voltage, when forming the electron beam into pulse beam and scanning a specimen, by producing two beams during one period of the pulse applied on the specimen thus producing the difference between the detected outputs. CONSTITUTION:The electron beam from an electron gun 2 provided in a mirror tube 1 is deflected by a pulse beam generating deflector 6 controlled by a pulse width phase control circuit 9 and a pulse beam is produced from an aperture board 7. Said beam will pass through a focus lens 3 then deflected 5X, 5Y and irradiates a specimen 4. An oscillator 8 is connected to said circuit 9 and a phase control circuit 10 while said circuit 9 is controlled such that two pulse beams will be produced during one period of a signal generator 11 which will apply the voltage on the specimen 4. The secondary electron from the specimen 4 is detected and amplified by an amplifier 14A or B then subtracted. With such structure a changed image (c) of the specimen images (a), (b) having the specific phase of the voltage applied on the specimen 4 is displayed.
JP13388680A 1980-09-26 1980-09-26 Strobe electron microscope Pending JPS5760650A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13388680A JPS5760650A (en) 1980-09-26 1980-09-26 Strobe electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13388680A JPS5760650A (en) 1980-09-26 1980-09-26 Strobe electron microscope

Publications (1)

Publication Number Publication Date
JPS5760650A true JPS5760650A (en) 1982-04-12

Family

ID=15115386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13388680A Pending JPS5760650A (en) 1980-09-26 1980-09-26 Strobe electron microscope

Country Status (1)

Country Link
JP (1) JPS5760650A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931549A (en) * 1982-08-13 1984-02-20 Hitachi Ltd Image display system of stroboscopic scanning type electron microscope
JPS60127648A (en) * 1983-12-14 1985-07-08 Hitachi Ltd Stroboscanning type electron microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5931549A (en) * 1982-08-13 1984-02-20 Hitachi Ltd Image display system of stroboscopic scanning type electron microscope
JPH05814B2 (en) * 1982-08-13 1993-01-06 Hitachi Ltd
JPS60127648A (en) * 1983-12-14 1985-07-08 Hitachi Ltd Stroboscanning type electron microscope

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