JPS5765659A - Electron microscope - Google Patents

Electron microscope

Info

Publication number
JPS5765659A
JPS5765659A JP14103080A JP14103080A JPS5765659A JP S5765659 A JPS5765659 A JP S5765659A JP 14103080 A JP14103080 A JP 14103080A JP 14103080 A JP14103080 A JP 14103080A JP S5765659 A JPS5765659 A JP S5765659A
Authority
JP
Japan
Prior art keywords
signal
indicating
objective lens
function
specimen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14103080A
Other languages
Japanese (ja)
Other versions
JPH0444380B2 (en
Inventor
Hatsujirou Hashimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP14103080A priority Critical patent/JPS5765659A/en
Publication of JPS5765659A publication Critical patent/JPS5765659A/en
Publication of JPH0444380B2 publication Critical patent/JPH0444380B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging; Apparatus specially adapted therefor, e. g. cameras, TV-cameras, photographic equipment or exposure control; Optical subsystems specially adapted therefor, e. g. microscopes for observing image on luminescent screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To confirm easily under what condition the image is obtained by displaying the disfocus amount indicating the shift of the specimen position from the correct focus position and the phase contrast conversion function of the objective lens through a function signal generating means. CONSTITUTION:The signal relating to the acceleration voltage of the electron beam, the signal indicating the disfocus amount of the specimen 1 position and the correct focus position from a specimen carrying mechanism 3 and the signal indicating the excitation current level of an objective lens 6 from an objective lens excitation operational means 17 are applied respectively on a function signal generating means 19a. Then the signal indicating the phase contrast transmission function of the objective lens 6 is provided to an indicating means 15 to produce a curve 20. While an electrical signal corresponding with the strength of the electron beam irradiating on a phosphor board 8 is provided from an image pick-up tube 11 to a preamplifier 12, while a Fourier conversion signal is provided from a Fourier conversion means 13a to an indicating means 15 thus to display a curve 21. Consequently it can be confirmed easily under what condition the image is obtained.
JP14103080A 1980-10-08 1980-10-08 Electron microscope Granted JPS5765659A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14103080A JPS5765659A (en) 1980-10-08 1980-10-08 Electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14103080A JPS5765659A (en) 1980-10-08 1980-10-08 Electron microscope

Publications (2)

Publication Number Publication Date
JPS5765659A true JPS5765659A (en) 1982-04-21
JPH0444380B2 JPH0444380B2 (en) 1992-07-21

Family

ID=15282576

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14103080A Granted JPS5765659A (en) 1980-10-08 1980-10-08 Electron microscope

Country Status (1)

Country Link
JP (1) JPS5765659A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0982257A (en) * 1995-09-14 1997-03-28 Toshiba Corp Astigmatism correction and focusing method for charged particle optical tube
JP2002373611A (en) * 2001-06-15 2002-12-26 Inst Of Physical & Chemical Res Electron microscope and focus position control method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0982257A (en) * 1995-09-14 1997-03-28 Toshiba Corp Astigmatism correction and focusing method for charged particle optical tube
JP2002373611A (en) * 2001-06-15 2002-12-26 Inst Of Physical & Chemical Res Electron microscope and focus position control method

Also Published As

Publication number Publication date
JPH0444380B2 (en) 1992-07-21

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