JPS5635362A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS5635362A
JPS5635362A JP11152879A JP11152879A JPS5635362A JP S5635362 A JPS5635362 A JP S5635362A JP 11152879 A JP11152879 A JP 11152879A JP 11152879 A JP11152879 A JP 11152879A JP S5635362 A JPS5635362 A JP S5635362A
Authority
JP
Japan
Prior art keywords
magnification
display
signal
cathode
amplitude
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11152879A
Other languages
Japanese (ja)
Inventor
Takashi Shimatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP11152879A priority Critical patent/JPS5635362A/en
Publication of JPS5635362A publication Critical patent/JPS5635362A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Abstract

PURPOSE:To obtain the actual scale factor for a display image in a correct display, by multiplying the magnification signal from a magnification selector circuit by the correction signal from a magnification regulator in a multiplier and displaying its output with display elements arranged in the vicinity of a cathode-ray tube. CONSTITUTION:A magnification selector circuit 10 is connected to between a horizontal-vertical scanning signal oscillator 5 and deflecting coils 4X, 4Y to both control an amplitude of scanning signal and generate a magnification signal in accordance with said amplitude. The magnification signal is binary coded, fed to multipliers 11, 12 here multiplied by correction signals from magnification regulators 13, 14. Then a display circuit 15 drives display elements 16 arranged in the vicinity of a cathode-ray tube 8a on the basis of an output from the multiplier 11 to display a corrected magnification on said display elements 16. In this way, the operator can work to handle the magnification selector circuit 10 while obseving the cathode-ray tube 8a and change the amplitude of the scanning signal continuously or in a stepped manner.
JP11152879A 1979-08-31 1979-08-31 Scanning electron microscope Pending JPS5635362A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11152879A JPS5635362A (en) 1979-08-31 1979-08-31 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11152879A JPS5635362A (en) 1979-08-31 1979-08-31 Scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS5635362A true JPS5635362A (en) 1981-04-08

Family

ID=14563614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11152879A Pending JPS5635362A (en) 1979-08-31 1979-08-31 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS5635362A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873949A (en) * 1981-10-28 1983-05-04 Hitachi Ltd Displayer of multiplying-factor fo scanning electron microscope
JPH0359937A (en) * 1989-07-27 1991-03-14 Fuji Photo Film Co Ltd Scale display unit of electron microscope
JP2012015029A (en) * 2010-07-02 2012-01-19 Keyence Corp Magnifying observation apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873949A (en) * 1981-10-28 1983-05-04 Hitachi Ltd Displayer of multiplying-factor fo scanning electron microscope
JPS6363111B2 (en) * 1981-10-28 1988-12-06
JPH0359937A (en) * 1989-07-27 1991-03-14 Fuji Photo Film Co Ltd Scale display unit of electron microscope
JP2012015029A (en) * 2010-07-02 2012-01-19 Keyence Corp Magnifying observation apparatus

Similar Documents

Publication Publication Date Title
JPS5650668A (en) Correcting system for reading output
JPS5635362A (en) Scanning electron microscope
GB1327419A (en) Method of and means for recording line drawings on the screen of a cathode ray tube under computer control
EP0088568A2 (en) Display vector generator utilising sine/cosine accumulation
GB1251891A (en)
US3403288A (en) Dynamic intensity corrections circuit
JPS55115247A (en) Scale factor controller for scanning electron microscope
JPS5626248A (en) Observing device for x-ray kossel diffraction pattern
ES8102359A1 (en) Device for displaying an analog signal on a display screen.
JPS54122978A (en) Detecting method and its apparatus for electron ray information in electron ray exposure unit
JPS5510215A (en) X-ray television unit
GB1406852A (en) Corpuscular beam apparatus
GB1390769A (en) Display systems
JPS54133872A (en) Electron-beam detector
SU1030999A1 (en) Device for displaying half-tone information
JPS5765659A (en) Electron microscope
JPS55130054A (en) Scanning electron microscope
JPS5762409A (en) Generating method for operation program of sequence controller
SU798597A1 (en) Crt-oscilloscope
SU605184A1 (en) Multichannel indicator
JPS5510321A (en) Gas shielded arc welder
JPS5631664A (en) Display unit for scanning sonar
JPS57161968A (en) Automatic cash deposition machine
JPS57189444A (en) Scale display method and scale indicator in scanning type electron microscope and similar device
SU711646A1 (en) Method of regulating the brightness of images of objects on the screen of image amplifier