JPS55115247A - Scale factor controller for scanning electron microscope - Google Patents

Scale factor controller for scanning electron microscope

Info

Publication number
JPS55115247A
JPS55115247A JP2277179A JP2277179A JPS55115247A JP S55115247 A JPS55115247 A JP S55115247A JP 2277179 A JP2277179 A JP 2277179A JP 2277179 A JP2277179 A JP 2277179A JP S55115247 A JPS55115247 A JP S55115247A
Authority
JP
Japan
Prior art keywords
scale factor
changed
sample
signal
change
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2277179A
Other languages
Japanese (ja)
Other versions
JPS5914222B2 (en
Inventor
Takashi Shimatani
Morihiro Okada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP2277179A priority Critical patent/JPS5914222B2/en
Publication of JPS55115247A publication Critical patent/JPS55115247A/en
Publication of JPS5914222B2 publication Critical patent/JPS5914222B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To maintain the right value of scale factor value displayed by a scale factor displayer at all times with the conditions for observation of sample are changed by correcting the scanning deflection signal intensity toward electron rays irradiated on sample.
CONSTITUTION: In order to change the scale factor of sample scanning image, the variable amplifying circuit 8 by which the amplitude intensity of scanning signal supplied to the deflecting coils 6X and 6Y by the output of the scale factor varying operation means 14 is changed is controlled and according to the degree of its amplitude, a scale factor value is displayed on the scale factor displaying means 15. Also, the compensatory arithmetic circuit 18 to which a signal corresponding to working distance and accelerated voltage values is applied is provided, and when its input signal is changed, a control signal such that a change in scale factor due to the change of the input signal is negated is generated to control the variable amplifier 9.
COPYRIGHT: (C)1980,JPO&Japio
JP2277179A 1979-02-28 1979-02-28 Magnification control device for scanning electron microscopes, etc. Expired JPS5914222B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2277179A JPS5914222B2 (en) 1979-02-28 1979-02-28 Magnification control device for scanning electron microscopes, etc.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2277179A JPS5914222B2 (en) 1979-02-28 1979-02-28 Magnification control device for scanning electron microscopes, etc.

Publications (2)

Publication Number Publication Date
JPS55115247A true JPS55115247A (en) 1980-09-05
JPS5914222B2 JPS5914222B2 (en) 1984-04-03

Family

ID=12091924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2277179A Expired JPS5914222B2 (en) 1979-02-28 1979-02-28 Magnification control device for scanning electron microscopes, etc.

Country Status (1)

Country Link
JP (1) JPS5914222B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57145259A (en) * 1981-03-03 1982-09-08 Akashi Seisakusho Co Ltd Scanning type electron microscope and its similar device
JPS59217935A (en) * 1983-05-26 1984-12-08 Hitachi Ltd Scanning type electron microscope
JPS6035448A (en) * 1983-08-06 1985-02-23 Agency Of Ind Science & Technol Picture correction device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57145259A (en) * 1981-03-03 1982-09-08 Akashi Seisakusho Co Ltd Scanning type electron microscope and its similar device
JPH036615B2 (en) * 1981-03-03 1991-01-30 Akashi Seisakusho Kk
JPS59217935A (en) * 1983-05-26 1984-12-08 Hitachi Ltd Scanning type electron microscope
JPS6035448A (en) * 1983-08-06 1985-02-23 Agency Of Ind Science & Technol Picture correction device
JPH0234425B2 (en) * 1983-08-06 1990-08-03 Kogyo Gijutsuin

Also Published As

Publication number Publication date
JPS5914222B2 (en) 1984-04-03

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