JPS56141156A - Sample image display device - Google Patents

Sample image display device

Info

Publication number
JPS56141156A
JPS56141156A JP4349580A JP4349580A JPS56141156A JP S56141156 A JPS56141156 A JP S56141156A JP 4349580 A JP4349580 A JP 4349580A JP 4349580 A JP4349580 A JP 4349580A JP S56141156 A JPS56141156 A JP S56141156A
Authority
JP
Japan
Prior art keywords
electron beam
sample
crt18
deflected
sample image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4349580A
Other languages
Japanese (ja)
Inventor
Teruo Kidoguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4349580A priority Critical patent/JPS56141156A/en
Publication of JPS56141156A publication Critical patent/JPS56141156A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To identify analytic results of a sample referred to each other, by independently displaying at the same time several kinds of signals of different scanning speed in a same sample image displayer. CONSTITUTION:An electron beam 2 is deflected by deflecting coils 7. From a sample 1 a secondary electron and X-rays are emitted by irradiation of the electron beam 2, and their beams 4, 6 are detected by detectors 3, 5 one of these detected signals is amplified by a video amplifier 14 while the other one is analyzed by an X-ray energy analyzer 15, then their outputs are introduced to a cathode-ray tube (CRT)18 via a signal selector circuit 16. The selector circuit 16 is controlled by a switching pulse generator circuit 12, and an electron beam of the CRT18 is deflected by a saw tooth wave signal speed converted in a speed conversion circuit. In this way, images devided in halves are displayed on a screen of the CRT18.
JP4349580A 1980-04-04 1980-04-04 Sample image display device Pending JPS56141156A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4349580A JPS56141156A (en) 1980-04-04 1980-04-04 Sample image display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4349580A JPS56141156A (en) 1980-04-04 1980-04-04 Sample image display device

Publications (1)

Publication Number Publication Date
JPS56141156A true JPS56141156A (en) 1981-11-04

Family

ID=12665287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4349580A Pending JPS56141156A (en) 1980-04-04 1980-04-04 Sample image display device

Country Status (1)

Country Link
JP (1) JPS56141156A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60154444A (en) * 1984-01-23 1985-08-14 Hitachi Naka Seiki Kk Image pick-up device of scanning type electron microscope etc.
JPS62271336A (en) * 1986-05-19 1987-11-25 Hitachi Ltd Display device for electron microscope
JPH02189849A (en) * 1989-01-18 1990-07-25 Jeol Ltd Converged ion beam device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60154444A (en) * 1984-01-23 1985-08-14 Hitachi Naka Seiki Kk Image pick-up device of scanning type electron microscope etc.
JPS62271336A (en) * 1986-05-19 1987-11-25 Hitachi Ltd Display device for electron microscope
JPH02189849A (en) * 1989-01-18 1990-07-25 Jeol Ltd Converged ion beam device

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