JPS55130055A - Scanning electron microscope - Google Patents
Scanning electron microscopeInfo
- Publication number
- JPS55130055A JPS55130055A JP3810679A JP3810679A JPS55130055A JP S55130055 A JPS55130055 A JP S55130055A JP 3810679 A JP3810679 A JP 3810679A JP 3810679 A JP3810679 A JP 3810679A JP S55130055 A JPS55130055 A JP S55130055A
- Authority
- JP
- Japan
- Prior art keywords
- magnification
- cathode ray
- ray tubes
- amplifiers
- fed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Abstract
PURPOSE:To easily correct the actual magnification of the image on a cathode ray tube by variating the scanning width of electron beams without changing the display value on a display unit. CONSTITUTION:The electron generated or scattered from each section of the sample is detected by a detector 7, amplified by amplifiers 8a and 8b, and fed into cathode ray tubes 9a and 9b. the cathode ray tubes 9a and 9b are for observation and photography, respectively. The sawtoothed wave signals from an oscillator 6 are fed into deflection coils 11a and 11b of both cathode ray tubes through amplifiers 12a and 12b. The magnification switching circuit 13 controls the amplitude of the sawtoothed wave signals by adjusting a magnification control operation means 14. The variance of the operation means 14 is sent to a magnification display unit 15 and the magnification is displayed. A magnification correction circuit 16 successively controls the horizontal and vertical scanning signals.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3810679A JPS55130055A (en) | 1979-03-30 | 1979-03-30 | Scanning electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3810679A JPS55130055A (en) | 1979-03-30 | 1979-03-30 | Scanning electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55130055A true JPS55130055A (en) | 1980-10-08 |
Family
ID=12516212
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3810679A Pending JPS55130055A (en) | 1979-03-30 | 1979-03-30 | Scanning electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55130055A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5873949A (en) * | 1981-10-28 | 1983-05-04 | Hitachi Ltd | Displayer of multiplying-factor fo scanning electron microscope |
JPH0249340A (en) * | 1987-10-30 | 1990-02-19 | Nano Quest Canada Inc | Multiplying factor regulator of scanning electron microscope |
-
1979
- 1979-03-30 JP JP3810679A patent/JPS55130055A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5873949A (en) * | 1981-10-28 | 1983-05-04 | Hitachi Ltd | Displayer of multiplying-factor fo scanning electron microscope |
JPS6363111B2 (en) * | 1981-10-28 | 1988-12-06 | ||
JPH0249340A (en) * | 1987-10-30 | 1990-02-19 | Nano Quest Canada Inc | Multiplying factor regulator of scanning electron microscope |
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