JPS55130055A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS55130055A
JPS55130055A JP3810679A JP3810679A JPS55130055A JP S55130055 A JPS55130055 A JP S55130055A JP 3810679 A JP3810679 A JP 3810679A JP 3810679 A JP3810679 A JP 3810679A JP S55130055 A JPS55130055 A JP S55130055A
Authority
JP
Japan
Prior art keywords
magnification
cathode ray
ray tubes
amplifiers
fed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3810679A
Other languages
Japanese (ja)
Inventor
Takashi Shimatani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP3810679A priority Critical patent/JPS55130055A/en
Publication of JPS55130055A publication Critical patent/JPS55130055A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To easily correct the actual magnification of the image on a cathode ray tube by variating the scanning width of electron beams without changing the display value on a display unit. CONSTITUTION:The electron generated or scattered from each section of the sample is detected by a detector 7, amplified by amplifiers 8a and 8b, and fed into cathode ray tubes 9a and 9b. the cathode ray tubes 9a and 9b are for observation and photography, respectively. The sawtoothed wave signals from an oscillator 6 are fed into deflection coils 11a and 11b of both cathode ray tubes through amplifiers 12a and 12b. The magnification switching circuit 13 controls the amplitude of the sawtoothed wave signals by adjusting a magnification control operation means 14. The variance of the operation means 14 is sent to a magnification display unit 15 and the magnification is displayed. A magnification correction circuit 16 successively controls the horizontal and vertical scanning signals.
JP3810679A 1979-03-30 1979-03-30 Scanning electron microscope Pending JPS55130055A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3810679A JPS55130055A (en) 1979-03-30 1979-03-30 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3810679A JPS55130055A (en) 1979-03-30 1979-03-30 Scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS55130055A true JPS55130055A (en) 1980-10-08

Family

ID=12516212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3810679A Pending JPS55130055A (en) 1979-03-30 1979-03-30 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS55130055A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873949A (en) * 1981-10-28 1983-05-04 Hitachi Ltd Displayer of multiplying-factor fo scanning electron microscope
JPH0249340A (en) * 1987-10-30 1990-02-19 Nano Quest Canada Inc Multiplying factor regulator of scanning electron microscope

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5873949A (en) * 1981-10-28 1983-05-04 Hitachi Ltd Displayer of multiplying-factor fo scanning electron microscope
JPS6363111B2 (en) * 1981-10-28 1988-12-06
JPH0249340A (en) * 1987-10-30 1990-02-19 Nano Quest Canada Inc Multiplying factor regulator of scanning electron microscope

Similar Documents

Publication Publication Date Title
GB1442177A (en) Scanning electron microscope apparatus
GB1000560A (en) Electron probe system
GB1276364A (en) A stereo scanning electron microscope and scanning apparatus therefor
JPS55130055A (en) Scanning electron microscope
KR930018641A (en) Cathode ray tube controller
US4321468A (en) Method and apparatus for correcting astigmatism in scanning electron microscopes and similar equipment
JPS56165255A (en) Image indicating method for transmission scan electron microscope
GB1315945A (en) Electron microscopes and microanalysers
JPH0343650Y2 (en)
JPS55126954A (en) Scanning electron microscope
JPS5581455A (en) Observing method for crossover image of electron gun
JPS56141156A (en) Sample image display device
JPH05266840A (en) Scanning electron microscope
JPS55166854A (en) Scanning electron microscope and magnification display unit in its simulator
GB1385170A (en) Scanning microscope display apparatus
JPS60140642A (en) Scanning electron microscope
JPS55130054A (en) Scanning electron microscope
JPS55115247A (en) Scale factor controller for scanning electron microscope
JPS54138467A (en) Scanning type electron microscope or resembling apparatus
JPS5736764A (en) Scan electron microscope
JPS594298Y2 (en) Sample equipment such as scanning electron microscopes
JPS5635361A (en) Scanning electron microscope
SU456325A1 (en) Rasto electron microscope
JPS57199164A (en) Sample image observation unit
SU687492A1 (en) Video idication device for raster electronic microscope