JPS5581455A - Observing method for crossover image of electron gun - Google Patents
Observing method for crossover image of electron gunInfo
- Publication number
- JPS5581455A JPS5581455A JP15610978A JP15610978A JPS5581455A JP S5581455 A JPS5581455 A JP S5581455A JP 15610978 A JP15610978 A JP 15610978A JP 15610978 A JP15610978 A JP 15610978A JP S5581455 A JPS5581455 A JP S5581455A
- Authority
- JP
- Japan
- Prior art keywords
- crossover image
- electron beams
- electron gun
- crossover
- diaphragm hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To easily observe a crossover image by scanning a focussed crossover image with a diaphram plate, detecting the electron beams passing through the diaphragm hole, and guiding them to a display unit.
CONSTITUTION: A crossover image is enlarged and focussed on the diaphragm plate 6 with the convergent lens 3. By supplying scanning signals to the deflection coils 12a and 12b in this state, the enlarged crossover image is two-dimensionally scanned at the diaphragm hole 6a. Also by the reflected electron beams E which correspond to the intensity of the electron beams passing through the diaphragm hole 6a with the detector 14, the brightness modulation of the cathode ray tube 16 is performed and the crossover image is displayed.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15610978A JPS5581455A (en) | 1978-12-15 | 1978-12-15 | Observing method for crossover image of electron gun |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15610978A JPS5581455A (en) | 1978-12-15 | 1978-12-15 | Observing method for crossover image of electron gun |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5581455A true JPS5581455A (en) | 1980-06-19 |
Family
ID=15620499
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15610978A Pending JPS5581455A (en) | 1978-12-15 | 1978-12-15 | Observing method for crossover image of electron gun |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5581455A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5732557A (en) * | 1980-08-01 | 1982-02-22 | Hitachi Ltd | Scan electron microscope |
-
1978
- 1978-12-15 JP JP15610978A patent/JPS5581455A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5732557A (en) * | 1980-08-01 | 1982-02-22 | Hitachi Ltd | Scan electron microscope |
JPS6248344B2 (en) * | 1980-08-01 | 1987-10-13 | Hitachi Ltd |
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