JPS5581455A - Observing method for crossover image of electron gun - Google Patents

Observing method for crossover image of electron gun

Info

Publication number
JPS5581455A
JPS5581455A JP15610978A JP15610978A JPS5581455A JP S5581455 A JPS5581455 A JP S5581455A JP 15610978 A JP15610978 A JP 15610978A JP 15610978 A JP15610978 A JP 15610978A JP S5581455 A JPS5581455 A JP S5581455A
Authority
JP
Japan
Prior art keywords
crossover image
electron beams
electron gun
crossover
diaphragm hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15610978A
Other languages
Japanese (ja)
Inventor
Seiichi Nakagawa
Naoki Date
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP15610978A priority Critical patent/JPS5581455A/en
Publication of JPS5581455A publication Critical patent/JPS5581455A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To easily observe a crossover image by scanning a focussed crossover image with a diaphram plate, detecting the electron beams passing through the diaphragm hole, and guiding them to a display unit.
CONSTITUTION: A crossover image is enlarged and focussed on the diaphragm plate 6 with the convergent lens 3. By supplying scanning signals to the deflection coils 12a and 12b in this state, the enlarged crossover image is two-dimensionally scanned at the diaphragm hole 6a. Also by the reflected electron beams E which correspond to the intensity of the electron beams passing through the diaphragm hole 6a with the detector 14, the brightness modulation of the cathode ray tube 16 is performed and the crossover image is displayed.
COPYRIGHT: (C)1980,JPO&Japio
JP15610978A 1978-12-15 1978-12-15 Observing method for crossover image of electron gun Pending JPS5581455A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15610978A JPS5581455A (en) 1978-12-15 1978-12-15 Observing method for crossover image of electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15610978A JPS5581455A (en) 1978-12-15 1978-12-15 Observing method for crossover image of electron gun

Publications (1)

Publication Number Publication Date
JPS5581455A true JPS5581455A (en) 1980-06-19

Family

ID=15620499

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15610978A Pending JPS5581455A (en) 1978-12-15 1978-12-15 Observing method for crossover image of electron gun

Country Status (1)

Country Link
JP (1) JPS5581455A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5732557A (en) * 1980-08-01 1982-02-22 Hitachi Ltd Scan electron microscope

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5732557A (en) * 1980-08-01 1982-02-22 Hitachi Ltd Scan electron microscope
JPS6248344B2 (en) * 1980-08-01 1987-10-13 Hitachi Ltd

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