JPS54148372A - Electron microscope - Google Patents

Abstract

PURPOSE: To enhance the handling performance of the microscope device by providing the display parts of various types of microscope images, the diffraction image and other measurement data or conditions in close positions to each other as much as possible.

CONSTITUTION: Lens barrel 1 is exhausted 9 in vacuum and controls lens 12 and coil 13 to irradiate the beams from electron gun 11 onto test sample 10. The image is formed on fluorescent plate 17 via the transmission electron beams plus lenses 14W16, or the magnified diffracion image is obtained. When observing the scan image, lens 12 and coil 13 are switched to the scan mode to detect 20 the electron beams which passed through the microholes and gaps 19 of secondary electron detector 18 and plate 17. The scan image is then modulated for the luminance to be displayed on the CRT. Another CRT22 is provided outside window 21 opposing to window 2 to display the same image as various scan images on the CRT. The screen of CRT22 is close to plate 17, and thus a simultaneous observation is possible both the CRT screen and the fluorescent plate through window 2. Thus, the comparison can be facilitated greatly for the images.

COPYRIGHT: (C)1979,JPO&Japio