JPH0539560Y2 - - Google Patents

Description

[Detailed description of the invention] A. Field of industrial application This invention applies multiple types of signal processing to one type of detection means in a charged beam scanning analyzer, converts them into different signal forms, and simultaneously processes each signal. It relates to a display device.

B. Conventional technology In scanning electron microscopes, EPMA, etc., the intensity of signals emitted from a sample is measured by scanning a charged beam.
Although it is common to display images by modulating the brightness of a CRT, there are now more and more cases in which the detected signal strength is displayed in a display format other than brightness. However, the number of types of video signals that can be obtained by changing the way the detection signal is processed has increased, but when handling such various video signals, conventionally, the signal processing circuit was switched for each video signal to be displayed. , and display the obtained video signals alternately on a CRT, or scan the same position twice during scanning, and switch the circuit for each scan to process the detected signal. The signal is displayed overlaid on a CRT. In recent years, image display methods have diversified, and there are now many ways to process and display a single detection signal, and it has become necessary to change the display method and display a single detection signal at the same time. However, one signal can still be displayed in multiple ways using different display methods.
There has never been a device that can display images simultaneously on a CRT.

C. Problems that the invention aims to solve As mentioned above, the invention aims to simultaneously process one type of detection signal using different processing methods in visual representation of the analysis results of the sample surface. The purpose is to facilitate intuitive, rapid, and detailed recognition of the state of the sample surface by displaying representations on multiple CRTs at the same time.

D. Means for solving the problem By inputting multiple image display means and one type of detection signal in a charged beam scanning analyzer,
A plurality of signal processing means for obtaining a plurality of types of video signals are provided, and these video signals are displayed on the plurality of video display means.

E. Effect According to the present invention, one type of detection signal detected by a detector is simultaneously processed by different signal processing circuits to obtain a plurality of video signals. By simultaneously displaying these multiple video signals on multiple CRTs, it has become possible to simultaneously compare and observe multiple images in different display formats. In this way, by visually comparing and observing sample analysis results in various formats, it has become possible to analyze samples in a more intuitive and detailed manner.

F. Example The figure shows an example of the present invention. In the figure, S
is the sample, B is the electron beam that excites the sample S, 1
deflects the electron beam B in the X-axis direction by the X-axis deflection coil. 2 is a Y-axis deflection coil that deflects the electron beam B in the X-axis direction. 3 is an X-axis deflection signal generator which provides X to the X-axis deflection coil 1 and CRTs 8 and 9.
Generates an axis scanning signal. 4 is a Y-axis deflection signal generator which provides Y-axis deflection signal to the Y-axis deflection coil 2 and CRTs 8 and 9.
Generates an axis scanning signal. 5 specifies the X-rays emitted from the sample and detects the characteristic X-rays of the specified elements.
This is a line spectroscopic detection section. 6 is a brightness modulator that converts the detection signal detected by the X-ray detector 5 into a brightness signal for the CRT 8; 7 is a Y-axis that superimposes the detection signal detected by the X-ray detector 5 on the Y-axis scanning signal of the CRT 9. It is a scanning signal modulator. These brightness modulators and Y-axis scanning signal modulators are connected in parallel to the X-ray detection section 5 by the signal processing means described in Section D.

In such a configuration, the characteristic X-rays of the target element excited by the electron beam B and emitted from the sample S are spectrally analyzed and detected by the X-ray detector 5. The detection signal detected by the X-ray detector 5 is sent to both the brightness modulator 6 and the Y-axis scanning signal modulator 7 simultaneously.

The stronger the signal strength of the detection signal sent to the brightness modulator 6, the brighter it will be displayed on the CRT 8.
Performs brightness modulation of CRT8. Therefore, the concentration distribution image of the target element of the sample S is displayed on the CRT 8 as a planar brightness image.

The detection signal sent to the Y-axis scanning signal modulator 7 is sent from the Y-axis deflection signal generator 4.
It is superimposed on the Y-axis scanning signal of the CRT9. When this superimposed signal is used for Y-axis deflection of CRT9,
The image displayed on the CRT is a graph in which one horizontal scanning line quantitatively represents the concentration distribution of the target element along the corresponding X-direction scanning line on the sample.
The sample image projected at 9 is displayed as a three-dimensional image of the detection signal intensity called an aero view.

In this manner, in this embodiment, two images, a planar image based on luminance and a stereoscopic image, can be observed simultaneously using one signal. The elemental distribution pattern can be seen at a glance in a bright and dark planar image, but since the human eye has a low ability to quantitatively grasp luminance differences, it is not possible to quantitatively know the specific concentration distribution from this alone, but at the same time, Quantitative recognition of concentration distribution is possible from the projected aeroview image.

G. Effects According to the present invention, video signals from different analytical display formats of the sample can be obtained simultaneously, and multiple images can be compared and observed at the same time, making it intuitive and detailed. Observation became possible, and analysis accuracy was further improved.

[Brief explanation of the drawing]

The drawing is a block diagram of an embodiment of the present invention. S...sample, B...electron beam, 1...X-axis deflection coil, 2...Y-axis deflection coil, 3...X-axis deflection signal generator, 4...Y-axis deflection signal generator, 5...
...X-ray spectroscopic detection unit, 6...Brightness modulator, 7...Y
Axis scanning signal modulator, 8...CRT, 9...CRT.

Claims (1)

[Scope of utility model registration request] one detection means, two signal processing means which are connected in parallel to each other and which simultaneously input the output signals of the detection means and convert them into two types of video signals; and two video signals to which these video signals are input. display means, one of the two signal processing means converts the input signal into a luminance modulation signal for the video display means, and the other converts the input signal into a Y-axis deflection signal for the aerobserver image. Characteristic charged beam scanning analyzer.