JPH0539560Y2 - - Google Patents
Info
- Publication number
- JPH0539560Y2 JPH0539560Y2 JP1986071586U JP7158686U JPH0539560Y2 JP H0539560 Y2 JPH0539560 Y2 JP H0539560Y2 JP 1986071586 U JP1986071586 U JP 1986071586U JP 7158686 U JP7158686 U JP 7158686U JP H0539560 Y2 JPH0539560 Y2 JP H0539560Y2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- video signals
- axis
- sample
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 18
- 238000009125 cardiac resynchronization therapy Methods 0.000 description 15
- 238000000034 method Methods 0.000 description 7
- 238000010894 electron beam technology Methods 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 3
- 101100262374 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) CDC21 gene Proteins 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 101100385969 Saccharomyces cerevisiae (strain ATCC 204508 / S288c) CYC8 gene Proteins 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004453 electron probe microanalysis Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Description
【考案の詳細な説明】
イ 産業上の利用分野
本考案は、荷電ビーム走査型分析装置におい
て、一種類の検出手段に複数種の信号処理を施
し、異る信号形態に変換し、夫々を同時に表示す
る装置に関する。[Detailed description of the invention] A. Field of industrial application This invention applies multiple types of signal processing to one type of detection means in a charged beam scanning analyzer, converts them into different signal forms, and simultaneously processes each signal. It relates to a display device.
ロ 従来の技術
走査型電子顕微鏡、EPMA等では荷電ビーム
走査によつて、試料から放出される信号の強度を
CRTの輝度に変調することにより、画像表示を
行うのが一般的であるが、検出信号強度を輝度以
外の表示形態にて表示する場合が増えてきた。し
かし、検出信号の処理の仕方によつて得られる映
像信号の種類が増えてきたが、このような種々の
映像信号を扱う場合、従来は表示したい映像信号
毎に信号処理回路を切り換えて検出信号を処理
し、得られた映像信号を交替に一つにCRTに表
示するか、走査時に同じ位置を2回走査し、1走
査毎に回路を切り換えて検出信号を処理して、得
られた映像信号をCRT上に重ねて表示したりし
ている。このように近年画像表示法が多様化し
て、1つの検出信号でもその処理・表示方法が多
くなつてきており、1つの検出信号を表示方法を
変えて、同時に表示することも必要となつてきた
が、まだ1つの信号を別々の表示方法で複数の
CRTに同時に表示するような装置は今までなか
つた。B. Conventional technology In scanning electron microscopes, EPMA, etc., the intensity of signals emitted from a sample is measured by scanning a charged beam.
Although it is common to display images by modulating the brightness of a CRT, there are now more and more cases in which the detected signal strength is displayed in a display format other than brightness. However, the number of types of video signals that can be obtained by changing the way the detection signal is processed has increased, but when handling such various video signals, conventionally, the signal processing circuit was switched for each video signal to be displayed. , and display the obtained video signals alternately on a CRT, or scan the same position twice during scanning, and switch the circuit for each scan to process the detected signal. The signal is displayed overlaid on a CRT. In recent years, image display methods have diversified, and there are now many ways to process and display a single detection signal, and it has become necessary to change the display method and display a single detection signal at the same time. However, one signal can still be displayed in multiple ways using different display methods.
There has never been a device that can display images simultaneously on a CRT.
ハ 考案が解決しようとする問題点
本考案は、上述したように、試料面の分析結果
の映像的表現において、得られた一種類の検出信
号を異る処理方法で同時に処理して、異る表現形
態の表示を、同時に複数のCRTに表示すること
により、試料表面の状態について直観的・迅速に
しかも詳細に認識することを容易にすることを目
的とする。C. Problems that the invention aims to solve As mentioned above, the invention aims to simultaneously process one type of detection signal using different processing methods in visual representation of the analysis results of the sample surface. The purpose is to facilitate intuitive, rapid, and detailed recognition of the state of the sample surface by displaying representations on multiple CRTs at the same time.
ニ 問題点解決のための手段
荷電ビーム走査型分析装置において、複数の映
像表示手段と、一種類の検出信号を入力させて、
複数種の映像信号を得る複数の信号処理手段を備
えこれらの映像信号を上記複数の映像表示手段で
表示させるようにした。D. Means for solving the problem By inputting multiple image display means and one type of detection signal in a charged beam scanning analyzer,
A plurality of signal processing means for obtaining a plurality of types of video signals are provided, and these video signals are displayed on the plurality of video display means.
ホ 作用
本考案によれば、検出器で検出された一種類の
検出信号を、同時に異る信号処理回路で処理して
複数の映像信号を得る。これらの複数の映像信号
を複数のCRTに同時に表示することにより、異
つた表示形態による複数の映像を同時に比較しな
がら観察することが出来るようになつた。このよ
うに試料の分析結果を視覚的に種々な形態で比較
しながら同時に観察することで、より感覚敵にし
かも詳細に試料分析を行うことができるようにな
つた。E. Effect According to the present invention, one type of detection signal detected by a detector is simultaneously processed by different signal processing circuits to obtain a plurality of video signals. By simultaneously displaying these multiple video signals on multiple CRTs, it has become possible to simultaneously compare and observe multiple images in different display formats. In this way, by visually comparing and observing sample analysis results in various formats, it has become possible to analyze samples in a more intuitive and detailed manner.
ヘ 実施例
図に本考案の一実施例を示す。図において、S
は試料、Bは試料Sを励起させる電子ビーム、1
はX軸偏向コイルで電子ビームBをX軸方向に偏
向させる。2はY軸偏向コイルで電子ビームBを
X軸方向に偏向させる。3はX軸偏向信号発生器
でX軸偏向コイル1及びCRT8,9に与えるX
軸走査信号を発生する。4はY軸偏向信号発生器
でY軸偏向コイル2及びCRT8,9に与えるY
軸走査信号を発生する。5は試料から放出される
X線を分光し、指定元素の特性X線を検出するX
線分光検出部である。6はX線検出部5で検出さ
れた検出信号をCRT8の輝度信号に変換する輝
度変調器、7はX線検出部5で検出された検出信
号をCRT9のY軸走査信号に重畳するY軸走査
信号変調器である。これらの輝度変調器とかY軸
走査信号変調器がニの項で述べた信号処理手段で
X線検出部5に対して互いに並列に接続されてい
る。F. Example The figure shows an example of the present invention. In the figure, S
is the sample, B is the electron beam that excites the sample S, 1
deflects the electron beam B in the X-axis direction by the X-axis deflection coil. 2 is a Y-axis deflection coil that deflects the electron beam B in the X-axis direction. 3 is an X-axis deflection signal generator which provides X to the X-axis deflection coil 1 and CRTs 8 and 9.
Generates an axis scanning signal. 4 is a Y-axis deflection signal generator which provides Y-axis deflection signal to the Y-axis deflection coil 2 and CRTs 8 and 9.
Generates an axis scanning signal. 5 specifies the X-rays emitted from the sample and detects the characteristic X-rays of the specified elements.
This is a line spectroscopic detection section. 6 is a brightness modulator that converts the detection signal detected by the X-ray detector 5 into a brightness signal for the CRT 8; 7 is a Y-axis that superimposes the detection signal detected by the X-ray detector 5 on the Y-axis scanning signal of the CRT 9. It is a scanning signal modulator. These brightness modulators and Y-axis scanning signal modulators are connected in parallel to the X-ray detection section 5 by the signal processing means described in Section D.
このような構成において、電子ビームBによつ
て励起されて、試料Sから放出される目的元素の
特性X線をX線検出部5で分光し検出する。X線
検出部5で検出された検出信号は輝度変調器6と
Y軸走査信号変調器7の両方へ同時に送られる。 In such a configuration, the characteristic X-rays of the target element excited by the electron beam B and emitted from the sample S are spectrally analyzed and detected by the X-ray detector 5. The detection signal detected by the X-ray detector 5 is sent to both the brightness modulator 6 and the Y-axis scanning signal modulator 7 simultaneously.
輝度変調器6に送られてきた検出信号は信号強
度が強い程明るくCRT8に映出されるように
CRT8の輝度変調を行う。従つて、CRT8には
試料Sの目的元素の濃度分布像が平面的な明暗像
として映出される。 The stronger the signal strength of the detection signal sent to the brightness modulator 6, the brighter it will be displayed on the CRT 8.
Performs brightness modulation of CRT8. Therefore, the concentration distribution image of the target element of the sample S is displayed on the CRT 8 as a planar brightness image.
Y軸走査信号変調器7に送られてきた検出信号
は、Y軸偏向信号発生器4から送られてきた
CRT9のY軸走査信号に重畳される。CRT9の
Y軸偏向にこの重畳信号を使用すると、CRT9
に映出される映像は、一本の水平走査線が試料上
における対応するX方向走査線に沿う目的元素の
濃度分布を数量的に表したグラフとなり、CRT
9に映された試料像は、エアロビユーと呼ばれる
検出信号強度の立体像として映出される。 The detection signal sent to the Y-axis scanning signal modulator 7 is sent from the Y-axis deflection signal generator 4.
It is superimposed on the Y-axis scanning signal of the CRT9. When this superimposed signal is used for Y-axis deflection of CRT9,
The image displayed on the CRT is a graph in which one horizontal scanning line quantitatively represents the concentration distribution of the target element along the corresponding X-direction scanning line on the sample.
The sample image projected at 9 is displayed as a three-dimensional image of the detection signal intensity called an aero view.
このようにしてこの実施例では、1つの信号に
よつて輝度による平面像と、立体像の2つの映像
を同時に観察することが出来る。明暗の平面像で
は元素分布パターンが一目で分かるが、人間の眼
は輝度差を定量的に把握する能力が低いから、こ
れだけでは具体的な濃度分布を定量的に知ること
は出来ないが、同時に映出されているエアロビユ
ー像によつて濃度分布の定量的認識ができる。 In this manner, in this embodiment, two images, a planar image based on luminance and a stereoscopic image, can be observed simultaneously using one signal. The elemental distribution pattern can be seen at a glance in a bright and dark planar image, but since the human eye has a low ability to quantitatively grasp luminance differences, it is not possible to quantitatively know the specific concentration distribution from this alone, but at the same time, Quantitative recognition of concentration distribution is possible from the projected aeroview image.
ト 効果
本考案によれば、試料の異つた分析表示形態に
よる映像信号が同時に得られるようになり、従つ
て複数の映像を比較しながら同時に観察できるよ
うになつたので、感覚的にしかも詳細な観察が可
能になり、分析精度が一段と向上した。G. Effects According to the present invention, video signals from different analytical display formats of the sample can be obtained simultaneously, and multiple images can be compared and observed at the same time, making it intuitive and detailed. Observation became possible, and analysis accuracy was further improved.
図面は本考案の実施例のブロツク図である。
S……試料、B……電子ビーム、1……X軸偏
向コイル、2……Y軸偏向コイル、3……X軸偏
向信号発生器、4……Y軸偏向信号発生器、5…
…X線分光検出部、6……輝度変調器、7……Y
軸走査信号変調器、8……CRT、9……CRT。
The drawing is a block diagram of an embodiment of the present invention. S...sample, B...electron beam, 1...X-axis deflection coil, 2...Y-axis deflection coil, 3...X-axis deflection signal generator, 4...Y-axis deflection signal generator, 5...
...X-ray spectroscopic detection unit, 6...Brightness modulator, 7...Y
Axis scanning signal modulator, 8...CRT, 9...CRT.
Claims (1)
れ、上記検出手段の出力信号が同時に入力され
て、二種類の映像信号に変換する二つの信号処理
手段と、これらの映像信号が入力される二つの映
像表示手段とを備え、上記二つの信号処理手段の
一方が入力信号を映像表示手段における輝度変調
信号に変換するものであり、他方がエアロビユー
像におけるY軸偏向信号に変換するものであるこ
とを特徴とする荷電ビーム走査型分析装置。 one detection means, two signal processing means which are connected in parallel to each other and which simultaneously input the output signals of the detection means and convert them into two types of video signals; and two video signals to which these video signals are input. display means, one of the two signal processing means converts the input signal into a luminance modulation signal for the video display means, and the other converts the input signal into a Y-axis deflection signal for the aerobserver image. Characteristic charged beam scanning analyzer.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986071586U JPH0539560Y2 (en) | 1986-05-12 | 1986-05-12 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986071586U JPH0539560Y2 (en) | 1986-05-12 | 1986-05-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62183354U JPS62183354U (en) | 1987-11-20 |
JPH0539560Y2 true JPH0539560Y2 (en) | 1993-10-07 |
Family
ID=30914270
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986071586U Expired - Lifetime JPH0539560Y2 (en) | 1986-05-12 | 1986-05-12 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0539560Y2 (en) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6073165U (en) * | 1983-10-25 | 1985-05-23 | 日本電子株式会社 | scanning electron microscope |
-
1986
- 1986-05-12 JP JP1986071586U patent/JPH0539560Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS62183354U (en) | 1987-11-20 |
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