JPS6073165U - scanning electron microscope - Google Patents
scanning electron microscopeInfo
- Publication number
- JPS6073165U JPS6073165U JP16499683U JP16499683U JPS6073165U JP S6073165 U JPS6073165 U JP S6073165U JP 16499683 U JP16499683 U JP 16499683U JP 16499683 U JP16499683 U JP 16499683U JP S6073165 U JPS6073165 U JP S6073165U
- Authority
- JP
- Japan
- Prior art keywords
- detectors
- electron microscope
- scanning electron
- sample
- output signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来装置の電気的接続図、第２図は本考案の一
実施例装置の電気的接続図、第３図は自動レベル設定回
路１９の一具体例である。
１：試料、２：電子ビーム、３：散乱電子、４．５：反
射電子検出器、６，７：プリアンプ、８．９：アンプ、
１０：加算回路、１１：減算回路、１２，１４：バッフ
ァアンプ、１３．１５：陰極線管、１６：ポテンショメ
ータ、１７．１８：可変抵抗、１９：自動レベル設定回
路、２０：スイッチ。FIG. 1 is an electrical connection diagram of a conventional device, FIG. 2 is an electrical connection diagram of an embodiment of the device of the present invention, and FIG. 3 is a specific example of the automatic level setting circuit 19. 1: sample, 2: electron beam, 3: scattered electrons, 4.5: backscattered electron detector, 6, 7: preamplifier, 8.9: amplifier,
10: addition circuit, 11: subtraction circuit, 12, 14: buffer amplifier, 13.15: cathode ray tube, 16: potentiometer, 17.18: variable resistor, 19: automatic level setting circuit, 20: switch.
Claims (1)
少な（とも２個の検出器を配置し、該雨検出器からの信
号を加算するための加算回路を設け、該加算回路よりの
信号を表示手段に表示して試料の組成像を得る装置にお
いて、特定期間中の前記加算回路の出力信号の内殻大出
力信号強度が予め定めた一定値となるように前記２つの
検出器の出力信号レベルを自動設定する手段を設けたこ
とを特徴とする走査電子顕微鏡。Two detectors are placed at approximately symmetrical positions with respect to the optical axis of the electron beam that irradiates the sample, and an adder circuit is provided to add the signals from the rain detectors, and the signal from the adder circuit is In the apparatus for obtaining a compositional image of a sample by displaying on a display means, the outputs of the two detectors are adjusted so that the inner shell large output signal intensity of the output signal of the adding circuit during a specific period becomes a predetermined constant value. A scanning electron microscope characterized by having a means for automatically setting a signal level.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16499683U JPS6073165U (en) | 1983-10-25 | 1983-10-25 | scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16499683U JPS6073165U (en) | 1983-10-25 | 1983-10-25 | scanning electron microscope |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6073165U true JPS6073165U (en) | 1985-05-23 |
Family
ID=30361588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16499683U Pending JPS6073165U (en) | 1983-10-25 | 1983-10-25 | scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6073165U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62183354U (en) * | 1986-05-12 | 1987-11-20 | ||
| JPH01159953A (en) * | 1987-12-15 | 1989-06-22 | Shimadzu Corp | Qualitative analyzing device |
| JP2006190554A (en) * | 2005-01-06 | 2006-07-20 | Jeol Ltd | Image adjusting method and device of a plurality of signals in electron microscope |
-
1983
- 1983-10-25 JP JP16499683U patent/JPS6073165U/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62183354U (en) * | 1986-05-12 | 1987-11-20 | ||
| JPH01159953A (en) * | 1987-12-15 | 1989-06-22 | Shimadzu Corp | Qualitative analyzing device |
| JP2006190554A (en) * | 2005-01-06 | 2006-07-20 | Jeol Ltd | Image adjusting method and device of a plurality of signals in electron microscope |
| JP4486509B2 (en) * | 2005-01-06 | 2010-06-23 | 日本電子株式会社 | electronic microscope |
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