JPS60105057U - scanning electron microscope - Google Patents
scanning electron microscopeInfo
- Publication number
- JPS60105057U JPS60105057U JP19761983U JP19761983U JPS60105057U JP S60105057 U JPS60105057 U JP S60105057U JP 19761983 U JP19761983 U JP 19761983U JP 19761983 U JP19761983 U JP 19761983U JP S60105057 U JPS60105057 U JP S60105057U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- detector
- electron
- scanning
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図面は、本考案の一実施例を示すためのものである。
１：電子銃、２：電子線、３：集束レンズ、４：対物レ
ンズ、５：試料、６：坩堝、７：加熱コイル、８：偏向
コイル、９：定年信号発生回路、１０：陰極線管、１１
：二次電子検出器、１２：増幅器、１３：映像増幅器、
１４ニゲリツド、１５：ローパスフィルター、１６：差
動増幅器、１７：基準電源、１８：バイアス回路。The drawings are for illustrating one embodiment of the present invention. 1: Electron gun, 2: Electron beam, 3: Focusing lens, 4: Objective lens, 5: Sample, 6: Crucible, 7: Heating coil, 8: Deflection coil, 9: Retirement signal generation circuit, 10: Cathode ray tube, 11
: Secondary electron detector, 12: Amplifier, 13: Video amplifier,
14: low-pass filter, 16: differential amplifier, 17: reference power supply, 18: bias circuit.
Claims (1)
を二次元的に走査するための手段と、該電子線の走査に
伴なって試料より発生する二次電子を検出するための二
次電子検出器と、該電子線の試料上における走査と同期
走査され該二次電子検出器よりの信号に基づいて試料像
を表示するための手段と、試料より発生する熱電子の該
二次電子検出器への入射を阻止するための試料と二次電
子検出器との間に配置され、負の電圧を与えられたグリ
ッドとを備えた装置において、二次電子検出器よりの検
出信号の平均レベルを表わす信号を得るための回路と、
該回路の出力信号と基準値とを比較し、該回路の出力信
号のレベルが基準値に一致するように前記グリッドに供
給される電圧を制御するための手段とを具備することを
特徴とする走査電子顕微鏡。means for heating a sample; means for two-dimensionally scanning an electron beam over the sample; and secondary means for detecting secondary electrons generated from the sample as the electron beam scans. an electron detector, means for displaying a sample image based on a signal from the secondary electron detector that is scanned in synchronization with the scanning of the electron beam on the sample, and the secondary electrons of thermoelectrons generated from the sample. In an apparatus equipped with a grid placed between the sample and the secondary electron detector and given a negative voltage to prevent the secondary electrons from entering the detector, the average of the detection signals from the secondary electron detector is a circuit for obtaining a signal representing a level;
and means for comparing the output signal of the circuit with a reference value and controlling the voltage supplied to the grid so that the level of the output signal of the circuit matches the reference value. Scanning electron microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19761983U JPS60105057U (en) | 1983-12-22 | 1983-12-22 | scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19761983U JPS60105057U (en) | 1983-12-22 | 1983-12-22 | scanning electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60105057U true JPS60105057U (en) | 1985-07-17 |
| JPH0234753Y2 JPH0234753Y2 (en) | 1990-09-19 |
Family
ID=30756008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19761983U Granted JPS60105057U (en) | 1983-12-22 | 1983-12-22 | scanning electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60105057U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5833657A (en) * | 1981-08-24 | 1983-02-26 | 丸山 隆司 | Supply apparatus of telephone, electricity, gas and service water for rotary house and waste water discharge apparatus |
-
1983
- 1983-12-22 JP JP19761983U patent/JPS60105057U/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5833657A (en) * | 1981-08-24 | 1983-02-26 | 丸山 隆司 | Supply apparatus of telephone, electricity, gas and service water for rotary house and waste water discharge apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0234753Y2 (en) | 1990-09-19 |
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