GB1425181A - Corpuscular beam apparatus - Google Patents

Corpuscular beam apparatus

Info

Publication number
GB1425181A
GB1425181A GB310673A GB310673A GB1425181A GB 1425181 A GB1425181 A GB 1425181A GB 310673 A GB310673 A GB 310673A GB 310673 A GB310673 A GB 310673A GB 1425181 A GB1425181 A GB 1425181A
Authority
GB
United Kingdom
Prior art keywords
screen
aperture
monitor
window
viewing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB310673A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Publication of GB1425181A publication Critical patent/GB1425181A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/224—Luminescent screens or photographic plates for imaging ; Apparatus specially adapted therefor, e.g. cameras, TV-cameras, photographic equipment, exposure control; Optical subsystems specially adapted therefor, e.g. microscopes for observing image on luminescent screen

Abstract

1425181 Electron microscopes SIEMENS AG 22 Jan 1973 [28 Jan 1972] 3106/73 Heading H1D [Also in Division H4] Corpuscular beam apparatus e.g. an electron microscope, comprises an apertured final luminescent screen 10 after object 4, a component of the beam passing through the aperture to a further luminescent screen 16 coupled via an optical system (e.g. fibre optics 15) to a TV camera 13 (e.g. via image intensifier 14). the camera producing an enlarged detailed image of the part of the final image defined by the aperture on a monitor screen. Remaining area 22 of the fibre system conveys the general picture via mirrors 17, 20 and lens 21 to TV monitor 23 producing side by side the general and detailed pictures 24, 25. Window 28 enables direct general picture viewing. Fig. 2 (not shown) produces a full size detail picture on screen (16<SP>1</SP>) and two monitors provide respective full size pictures, the general picture being transmitted via lens (21) in the microscope wall. Fig. 3 (not shown) includes opaque final image screen (10<SP>1</SP>) providing a reflected general picture. Fig. 4 (not shown) includes pivotable luminescent screen (43) allowing a more favourable viewing angle and which may be folded over for access to a photographic recording device. Second window (46) allows viewing of TV monitor (47) providing the display from camera (51), the observer at (50) then seeing screen (43) and monitor (47). Beneath screen (43) a displaceable photographic recording device (not shown) of magazine, a location for the plates and a transfer device for the plates, may be provided. Aperture (52) may be temporarily filled in or covered by member (54), this being above, below or in the aperture, and may be moved mechanically. Indicator (53) shows the magnification e.g. in numerical form as luminous digits and may be outside the evacuated space for viewing through window (46) or can be adjacent window (45). Eyepiece (55) for direct magnified observation may be fixed or detachable.
GB310673A 1972-01-28 1973-01-22 Corpuscular beam apparatus Expired GB1425181A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2204654A DE2204654C3 (en) 1972-01-28 1972-01-28 Corpuscular beam device with a fluorescent screen and a television camera

Publications (1)

Publication Number Publication Date
GB1425181A true GB1425181A (en) 1976-02-18

Family

ID=5834691

Family Applications (1)

Application Number Title Priority Date Filing Date
GB310673A Expired GB1425181A (en) 1972-01-28 1973-01-22 Corpuscular beam apparatus

Country Status (5)

Country Link
US (1) US3835246A (en)
JP (1) JPS49107170A (en)
DE (1) DE2204654C3 (en)
GB (1) GB1425181A (en)
NL (1) NL7217847A (en)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7609574A (en) * 1975-09-03 1977-03-07 Siemens Ag PROCEDURE FOR IMAGE DISPLAY OF THE OUTPUT INFORMATION FROM A DEVICE SCANNING AN OBJECT.
DE2542355A1 (en) * 1975-09-19 1977-03-24 Siemens Ag RADIATION SCREEN ELECTRON MICROSCOPE WITH DISC-SHAPED DETECTOR
JPS5248964A (en) * 1975-10-17 1977-04-19 Hitachi Ltd Transmission-type scanning electronic microscope
JPS5275261A (en) * 1975-12-19 1977-06-24 Jeol Ltd Test piece image dispaly unit
JPS5477060A (en) * 1977-12-01 1979-06-20 Hitachi Ltd Electron microscope
JPS5851664B2 (en) * 1979-03-28 1983-11-17 株式会社日立製作所 Sample image display device
JPS58155636A (en) * 1982-03-12 1983-09-16 Hitachi Ltd Holography electron microscope
US4651200A (en) * 1985-02-04 1987-03-17 National Biomedical Research Foundation Split-image, multi-power microscopic image display system and method
US4673973A (en) * 1985-02-04 1987-06-16 National Biomedical Research Foundation Split-image, multi-power microscopic image display system and method
USRE33883E (en) * 1985-02-04 1992-04-14 National Biomedical Research Foundation Split-image multi-power microscopic image display system and method
US4769698A (en) * 1985-10-04 1988-09-06 National Biomedical Research Foundation Interactive microscopic image display system and method
JP2702114B2 (en) * 1986-10-03 1998-01-21 株式会社日立製作所 electronic microscope
JPS63122421A (en) * 1986-11-12 1988-05-26 株式会社東芝 Endoscope apparatus
US5013915A (en) * 1988-05-20 1991-05-07 Hitachi, Ltd. Transmission type electron microscope
JPH05128991A (en) * 1991-08-09 1993-05-25 Hikari Gijutsu Kenkyu Kaihatsu Kk Real-time surface monitoring device
JP3153277B2 (en) * 1991-08-30 2001-04-03 株式会社日立製作所 Transmission electron microscope
JPH06213832A (en) * 1993-01-18 1994-08-05 Shimadzu Corp Detecting apparatus of diffracted electron
US7325354B2 (en) * 2004-05-06 2008-02-05 Insight Technology, Inc. Weapon aiming device
DE102005063142B4 (en) * 2005-12-31 2008-03-06 Olympus Soft Imaging Solutions Gmbh Electron microscope, in particular transmission electron microscope
US20070236489A1 (en) * 2006-01-30 2007-10-11 Jung Edward K Positional display elements
US7745786B2 (en) * 2008-03-19 2010-06-29 Fama Leo A Method and apparatus allowing simultaneous direct observation and electronic capture of scintillation images in an electron microscope
JP5826064B2 (en) * 2012-02-17 2015-12-02 株式会社日立ハイテクノロジーズ electronic microscope

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2894160A (en) * 1954-09-09 1959-07-07 Sheldon Edward Emanuel Electron microscopes
US3345514A (en) * 1963-10-19 1967-10-03 Hitachi Ltd Television camera combined with an electron microscope and having a plurality of cathodoconductive targets
US3301949A (en) * 1964-03-02 1967-01-31 United Aircraft Corp Stored image control system for beam machining
US3333057A (en) * 1966-10-07 1967-07-25 Minnesota Mining & Mfg High density microfacsimile system
US3614311A (en) * 1968-02-28 1971-10-19 Hitachi Ltd Apparatus for simultaneously displaying a plurality of images of an object being analyzed in an electron beam device

Also Published As

Publication number Publication date
DE2204654B2 (en) 1974-03-14
DE2204654A1 (en) 1973-08-02
DE2204654C3 (en) 1974-10-10
US3835246A (en) 1974-09-10
NL7217847A (en) 1973-07-31
JPS49107170A (en) 1974-10-11

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Legal Events

Date Code Title Description
PS Patent sealed [section 19, patents act 1949]
PCNP Patent ceased through non-payment of renewal fee