JPS57205954A - Scanning color electro microscope - Google Patents

Scanning color electro microscope

Info

Publication number
JPS57205954A
JPS57205954A JP8911781A JP8911781A JPS57205954A JP S57205954 A JPS57205954 A JP S57205954A JP 8911781 A JP8911781 A JP 8911781A JP 8911781 A JP8911781 A JP 8911781A JP S57205954 A JPS57205954 A JP S57205954A
Authority
JP
Japan
Prior art keywords
color
image
scanning electron
electron microscope
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8911781A
Other languages
Japanese (ja)
Inventor
Susumu Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP8911781A priority Critical patent/JPS57205954A/en
Publication of JPS57205954A publication Critical patent/JPS57205954A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/22—Treatment of data
    • H01J2237/221—Image processing
    • H01J2237/225—Displaying image using synthesised colours

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To enable the color pertinent to a sample to be added to the image of a scanning electron microscope having a high resolution by photographing an optical image of the same visual field as that of a scanning electron microscope by means of a color image pickup means, supplying thus obtained color video signal to a color CRT displayer so as to display an optical image given the color pertinent to the sample, and modulating the luminance of the color CRT displayer by use of detection signals sent from the scanning electron microscope. CONSTITUTION:A color-synthesizing video signal having color information representing the color pertinent to a sample illuminated by a white light (L) is obtained from a camera 14. On the other hand, a detection signal (S) having shade information concerning the intensity of secondary electrons produced from the same part as above of the sample is obtained from a scanning electron microscope. Since the above color-synthesizing video signal is sent into a displayer, the color image (the image of an optical microscope) of the visual field observed with the camera 14 is displayed on the picture suface of a color CRT15. here, since the above detection signal (S), as it is, is added to a lightness signal (Y), the image of a scanning electron microscope (a shade image) obtained by the signal (S) is displayed by being duplicated on the above color image.
JP8911781A 1981-06-10 1981-06-10 Scanning color electro microscope Pending JPS57205954A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8911781A JPS57205954A (en) 1981-06-10 1981-06-10 Scanning color electro microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8911781A JPS57205954A (en) 1981-06-10 1981-06-10 Scanning color electro microscope

Publications (1)

Publication Number Publication Date
JPS57205954A true JPS57205954A (en) 1982-12-17

Family

ID=13961943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8911781A Pending JPS57205954A (en) 1981-06-10 1981-06-10 Scanning color electro microscope

Country Status (1)

Country Link
JP (1) JPS57205954A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6124136A (en) * 1984-07-13 1986-02-01 Hitachi Ltd Ion beam irradiator

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6124136A (en) * 1984-07-13 1986-02-01 Hitachi Ltd Ion beam irradiator

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